玻璃微结构电解电火花加工关键技术研究

发布时间：2018-10-18 17:56

【摘要】：非导电硬脆材料由于其优异的性能:高硬度、高强度、耐磨性好、绝缘和导热性能等,被越来越广泛的使用在各种工程领域,特别是随着微机电系统的蓬勃发展,各种非导电硬脆材料微结构被大量应用于航空航天、汽车电子、生物医疗、国防科技等领域。由于非导电硬脆材料本身的属性,导致其微结构的加工非常困难。电解电火花加工技术已经被报道是一种经济有效的非导电硬脆材料微结构加工方法,可以克服其硬脆及非导电特性。针对非导电硬脆材料微结构的巨大需求,本文选取玻璃作为研究对象,利用微细电解电火花加工技术进行了一系列的试验研究,主要研究内容包括以下几个方面:(1)对电解电火花加工机理进行了深入分析,对其"电介质"—气膜的形成机理和材料去除机理进行探讨,认为工具电极放电热去除和高温加速化学反应去除是其材料去除的主要方式。根据加工机理及试验要求,搭建了微细电解电火花加工试验平台。(2)建立了微细电解电火花钻铣削加工的间隙流场仿真模型,仿真结果表明,高速旋转的螺纹型工具电极对间隙流场中电解液的更新有非常重要的作用;建立了微细电解电火花钻铣削加工中能量和侧面加工间隙的数学模型,分别试验研究了主要工艺参数对加工定域性的影响,加工定域性由侧面加工间隙表征。研究结果表明,随着电压和占空比的增大,加工定域性变差;随着脉冲频率和进给速度的增大,加工定域性得到提高。利用优化的工艺参数在玻璃工件上钻削出微孔阵列、铣削出微槽阵列,加工出深小孔、复杂微流道、三维台阶等玻璃微结构。初步讨论了超声振动的电解液对钻孔加工效果的影响,发现超声振动电解液可以获得更好的入口加工质量。(3)提出一种旋转电极微细电解电火花切割加工方法,建立了该方法的间隙流场仿真模型,仿真结果表明,该方法可以有效提高切割加工间隙中的电解液更新。建立了使用该方法加工中能量和侧面加工间隙的数学模型,并试验研究了各工艺参数对加工定域性的影响。试验结果表明:随着电压、占空比和电解液浓度的增高,加工定域性变差;随着脉冲频率、主轴转速和进给速度的增加,加工定域性变好。对玻璃材料进行切割加工试验,选用优化的参数加工出微缝阵列,成功加工出多个典型玻璃微结构。研究结果证明,本文提出的旋转电极切割方法可以有效加工玻璃微结构。本文分别利用微细电解电火花钻铣削及切割加工方式研究了主要工艺参数对加工定域性的影响,加工出微孔、微槽、微缝阵列,钻削出玻璃深小孔,铣削加工出复杂微流道、三维台阶结构。利用本文提出的旋转电极切割方法加工出许多典型玻璃微结构,获得了良好的加工效果。
[Abstract]:Non-conductive hard brittle materials are more and more widely used in various engineering fields, especially with the rapid development of MEMS, because of their excellent properties, such as high hardness, high strength, good wear resistance, insulation and thermal conductivity, etc. All kinds of non-conductive hard-brittle materials are widely used in aerospace, automotive electronics, biomedicine, defense science and technology and so on. Due to the properties of non-conductive hard brittle materials, it is very difficult to process the microstructure. Electrolysis EDM (EDM) has been reported to be an economical and effective method for micro-structure machining of non-conductive hard brittle materials, which can overcome its hard-brittle and non-conductive characteristics. In order to meet the great demand for the microstructure of non-conductive hard brittle materials, a series of experiments were carried out in this paper by using the micro-electrolysis EDM (EDM) technology, and glass was selected as the research object. The main research contents are as follows: (1) the mechanism of EDM is analyzed, and the mechanism of dielectric film formation and material removal are discussed. It is considered that the main ways of material removal are tool electrode discharge electrothermal removal and high temperature accelerated chemical reaction removal. According to the machining mechanism and test requirements, a micro-electrolysis EDM test platform is set up. (2) the simulation model of gap flow field in micro-ECEDM milling is established, and the simulation results show that, The threaded tool electrode with high speed rotation plays an important role in the renewal of electrolyte in the gap flow field, and the mathematical model of energy and side machining gap in micro electrolysis EDM milling is established. The effects of main process parameters on machining localization were studied respectively. The processing localization was characterized by side machining clearance. The results show that the processing localization becomes worse with the increase of voltage and duty cycle, and increases with the increase of pulse frequency and feed speed. The optimized process parameters are used to drill out the microporous array on the glass workpiece, milling the microgroove array, and machining the glass microstructures such as deep holes, complex microchannels, three-dimensional steps, and so on. The effect of ultrasonic vibration electrolyte on drilling efficiency is discussed. It is found that ultrasonic vibration electrolyte can obtain better quality of inlet machining. (3) A method of micro electrolysis EDM with rotating electrode is proposed. The simulation model of the gap flow field of this method is established. The simulation results show that the method can effectively improve the electrolyte renewal in the cutting gap. A mathematical model of energy and side machining clearance is established by using this method, and the effects of various process parameters on processing localization are studied experimentally. The experimental results show that with the increase of voltage, duty cycle and electrolyte concentration, the processing localization becomes worse, and with the increase of pulse frequency, spindle speed and feed speed, the processing localization becomes better. The glass material was cut and processed, and the optimized parameters were used to fabricate the microslot array, and several typical glass microstructures were successfully machined. The results show that the rotating electrode cutting method proposed in this paper can effectively process glass microstructures. In this paper, the effects of main technological parameters on machining localization are studied by means of micro electrolytic EDM drilling and cutting respectively. Microholes, microgrooves, microslot arrays, deep glass holes are drilled, and complex microchannels are machined by milling. Three dimensional step structure. Many typical glass microstructures have been fabricated by using the rotating electrode cutting method proposed in this paper, and good processing results have been obtained.
【学位授予单位】：山东大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TQ171.68

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