基于并行共聚焦显微系统的物方差动轴向测量

发布时间：2018-01-16 02:19

本文关键词：基于并行共聚焦显微系统的物方差动轴向测量　出处：《光学精密工程》2017年06期 　论文类型：期刊论文

【摘要】：差动共聚焦显微成像技术可以获得很高的轴向测量精度,然而已有的差动共聚焦测量技术主要适用于激光扫描共聚焦,还不能满足微纳加工过程中对工件进行非接触式的在线、在位测量的要求。本文在分析差动共聚焦显微成像系统能够实现轴向测量原理的基础上,提出了适用于并行共聚焦技术的轴向测量方法。该方法利用均匀白光照明,在像方只需要使用一台相机做探测器,在物方通过移动载物台分别对样品在焦前和焦后两次成像,根据预先刻度好的差动曲线就可以得出物体表面的高度。理论模拟与实验结果均表明,该方法可以实现高精度的轴向测量,对500nm的台阶样品测量的平均误差为2.9nm,相对误差为0.58%。该方法简单、廉价、测量精度高,可以用于普通显微镜,易于实现样品的三维快速形貌还原与测量。
[Abstract]:Differential confocal microscopy technology can obtain high axial measurement accuracy, however, the existing differential confocal measurement technology is mainly suitable for laser scanning confocal. It can not meet the requirement of non-contact on-line and in-situ measurement of workpiece in the process of micro-nano machining. This paper analyzes the principle of axial measurement by differential confocal microscopy system. An axial measurement method suitable for parallel confocal technique is proposed. The method uses uniform white light illumination and only one camera is used as detector in the image side. The surface height of the object can be obtained according to the pre-focal and post-focal imaging of the sample by moving the carrier station. The theoretical simulation and experimental results show that the height of the object surface can be obtained from the pre-calibrated differential curve. This method can achieve high precision axial measurement. The average error of the step sample at 500nm is 2.9 nm and the relative error is 0.58.The method is simple, cheap and has high measurement accuracy. It can be used in ordinary microscope, and it is easy to realize the rapid reduction and measurement of 3D morphology of samples.
【作者单位】：华侨大学机电及自动化学院;闽江学院物理学与电子信息工程系;福建工程学院机械与汽车工程学院;
【基金】：国家科技支撑计划一级子课题资助项目(No.2012BAI23B04) 福建省中青年教师教育科研项目(No.JAT160394) 华侨大学高层次引进人才科研启动资金资助项目(No.Z14Y0064)
【分类号】：TG806
【正文快照】： (1.College of Mechanical Engineering and Automation,Huaqiao University,Xiamen361021,China;2.Department of Physics and Electronic Information Engineering,Minjiang University,Fuzhou350108,China;3.School of Mechanical and Automative Engineering,Fujian Unive

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