光学硬脆材料固结磨料研磨中的亚表面损伤预测

发布时间：2018-01-20 08:32

本文关键词： 光学硬脆材料固结磨料研磨离散元法亚表面损伤　出处：《光学精密工程》2017年02期 　论文类型：期刊论文

【摘要】：研磨过程中亚表面损伤层深度的正确预测是研磨工艺参数制定的重要依据。针对固结磨料的研磨特点,选择两种典型光学硬脆材料(镁铝尖晶石和石英玻璃),采用离散元仿真技术,分别建立了两种材料的二维离散元模型,分析了工艺参数对光学硬脆材料亚表面损伤(裂纹)层深度的影响。而后,采用角度抛光法测量了镁铝尖晶石和石英玻璃的亚表面损伤层深度,进行了实验验证。结果表明:采用固结磨料研磨时,磨粒粒径对光学硬脆材料亚表面损伤的影响相当显著,在相同研磨工艺条件下,随着磨粒粒径的增大,亚表面损伤层深度和微裂纹密集程度明显增加。离散元仿真结果与实验结果的对比表明:采用离散元技术可以对光学硬脆材料的亚表面损伤深度进行快速有效的预测,从而为后续的研磨抛光工艺提供参考与指导。
[Abstract]:The correct prediction of the depth of the surface damage layer in the grinding process is an important basis for the formulation of the grinding process parameters. According to the grinding characteristics of the consolidated abrasive, two typical optical hard brittle materials (magnesia-aluminum spinel and quartz glass) are selected. Two dimensional discrete element models of two kinds of materials are established by using discrete element simulation technique. The influence of process parameters on the depth of subsurface damage (crack) layer of optical hard brittle materials is analyzed. The depth of the subsurface damage layer of magnesia-aluminum spinel and quartz glass was measured by angle polishing method. The effect of abrasive particle size on the subsurface damage of optical hard and brittle materials is very significant, and under the same grinding process conditions, with the increase of abrasive particle size. The depth of the subsurface damage layer and the density of microcracks are obviously increased. The results of discrete element simulation and experimental results show that:. The discrete element technique can be used to predict the depth of subsurface damage of hard and brittle optical materials quickly and effectively. So as to provide reference and guidance for the subsequent grinding and polishing process.
【作者单位】：南京航空航天大学机电学院江苏省精密与微细制造技术重点实验室;
【基金】：国家自然科学基金资助项目(No.51675276) 航空科学基金(2014ZE52055) 江苏省精密与微细制造技术重点实验开放基金资助项目
【分类号】：TG580.68
【正文快照】： 1引言随着科技的发展,对硬脆材料(如陶瓷、光学玻璃等)的应用日益广泛,同时对其表面质量也提出了更高要求。在研磨抛光过程中,光学硬脆材料极易出现亚表面损伤(Sub Surface Damage,SSD),从而降低光学元件的强度、长期稳定性、成像质量、镀膜质量和抗激光损伤阈值等重要性能指

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