玻璃衬底上FePd薄膜的厚度对其结构和磁性能的影响（英文）

发布时间：2018-02-09 03:08

本文关键词： FePd薄膜晶粒生长磁化过程　出处：《稀有金属材料与工程》2017年07期 　论文类型：期刊论文

【摘要】：采用磁控溅射方法在玻璃衬底上制备了不同厚度的FePd合金薄膜。利用X射线衍射(XRD),能谱(EDS)和物理性能测试研究了薄膜厚度对结构和磁性能的影响。结果表明,在FePd合金薄膜中有序化过程发生在更厚的薄膜中。随着薄膜厚度从d=22.5 nm增加到d=67.5 nm,面内矫顽力刚开始急剧增大,然后随着薄膜厚度的进一步增加矫顽力会减小。在d=67.5 nm时面内矫顽力最大约为3.2×79.6kA/m。
[Abstract]:FePd alloy thin films of different thickness were prepared on glass substrates by magnetron sputtering. The effect of thickness on the structure and magnetic properties was investigated by X-ray diffraction (XRD) and energy dispersive spectroscopy (EDS) and physical properties. In FePd alloy films, the ordering process occurs in the thicker films. As the thickness of the films increases from 22.5 nm to 67.5 nm, the in-plane coercivity increases sharply. Then the coercivity decreases with the increase of film thickness, and the maximum in plane coercivity is about 3.2 脳 79.6 Ka / m at 67.5 nm.
【作者单位】：广西信息材料重点实验室;桂林电子科技大学;
【基金】：National Key Basic Research Development Program of China(“973” Program)(2014CB643703) National Natural Science Foundation of China(51261004,51461012) Natural Science Foundation of Guangxi(2013GXNSFBA019242) the Research Foundation of Guangxi Key Laboratory of Information Materials(131003-Z,131007-Z)
【分类号】：TB383.2;TG132.27

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