超精密铣研复合加工系统设计及其实验研究

发布时间：2018-02-16 15:22

本文关键词： 薄壁微构件气体静压导轨精度检测微铣削研磨　出处：《哈尔滨工业大学》2017年硕士论文　论文类型：学位论文

【摘要】：微小尺寸零部件在航空航天、医学及微电子工业等领域发挥着举足轻重的作用。在传统机械加工基础上发展起来的微细机械加工技术具有很大的灵活性,可以完成各种形式的铣削、车削、磨削等操作,同时相对于刻蚀类加工,微细机械加工拥有更高的加工效率,所以该技术拥有很好的发展和应用前景。具有特征尺寸的微小关键部件制造是目前制造领域的重点和难点。本课题主要面向航空重点型号技改项目中具有薄壁微结构的弹性敏感元件(薄壁微构件),研制超精密铣研复合微细加工机床,本文将分析并依据其技术指标要求进行复合加工系统设计,解决包含超精密运动系统的精度检测、高精度位置控制与微力感知检测等技术难题。根据微构件的加工需求,完成了超精密铣研复合加工系统的总体设计;根据气体静压支撑工作原理,推导了矩形空气静压导轨在节流孔单列分布与双列分布时静态性能的计算公式,并给出了节流孔单列分布时静态性能计算的一种修正方法,进一步完成了矩形气体静压导轨的静态特性计算。对十字形气体静压导轨进行设计,完成基于气体静压导轨的运动系统设计、装配调试以及精度检测。针对垂直方向精确进给的需求,完成了高精度垂直位移工作台的设计、制造以及精度检测。针对高速铣削方案,对微铣削中高速气浮电主轴进行通讯控制和调试,采用VS与LABVIEW编写控制软件;针对微构件的研磨加工的需求,对在位研磨中微力感知二维力传感器的进行设计和制造,完成在位研磨系统的调试以及研磨加工中对刀方案的确定。利用超精密铣研复合加工加床,进行了一系列的加工和验证性试验。对于微铣削加工工艺实验,探究了每齿进给量以及切削深度对微构件槽底表面质量的影响,进一步优化微铣削参数改善微构件的加工质量;完成了变质层精确去除的研磨工艺实验,研究研磨膏粒度以及研磨轨迹对微构件加工的影响。成功加工出合格的微构件,为将来微构件的批量加工提供技术支持。
[Abstract]:Micro-size parts play an important role in the fields of aerospace, medicine and microelectronics. The micro-machining technology developed on the basis of traditional machining has great flexibility. Can complete various forms of milling, turning, grinding and other operations, while compared to etching processing, micro-machining has a higher processing efficiency, Therefore, the technology has a good development and application prospects. The manufacture of small key parts with characteristic size is the key and difficult point in the field of manufacture. This subject is mainly aimed at the thin-walled micro in the key aeronautical model technical innovation project. The elastic sensitive element of the structure (thin-walled micro-member) is developed for ultra-precision milling and grinding composite micro-machining machine, This paper will analyze and design the compound machining system according to its technical specifications, solve the technical problems including precision detection of ultra-precision motion system, high-precision position control and micro-force sensing detection. The overall design of the ultra-precision milling and grinding compound machining system is completed, and the formula for calculating the static performance of the rectangular air static guide rail under the single and double row distribution of the throttle hole is derived according to the working principle of the gas static pressure support. A modified method of static performance calculation for single row distribution of throttle holes is presented, and the static characteristic calculation of rectangular gas hydrostatic guide rail is further completed. The cross gas static pressure guide rail is designed. The design of motion system, assembly debugging and precision testing based on pneumatic static guide rail is completed. According to the demand of accurate feed in vertical direction, the design of high precision vertical displacement table is completed. Manufacturing and precision testing. For high-speed milling scheme, communication control and debugging of high-speed air-floating motorized spindle in micro-milling, programming control software with vs and LABVIEW, aiming at the requirement of grinding processing of micro-components, The design and manufacture of the micro force sensing two dimensional force sensor in in-situ grinding, the debugging of the in situ grinding system and the determination of the tool scheme in the grinding process are carried out. A series of machining and validating experiments were carried out. The effects of feed per tooth and cutting depth on the surface quality of groove bottom of micro-components were investigated in order to optimize the parameters of micro-milling to improve the machining quality of micro-components. The grinding process experiment of precise removal of metamorphic layer was completed, and the influence of grinding paste size and grinding track on the machining of micro-components was studied. The qualified micro-components were successfully processed, which provided technical support for batch processing of micro-components in the future.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG65

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