菲涅尔微结构模芯精密磨削的砂轮磨损和工艺优化研究

发布时间：2018-03-06 14:47

本文选题：砂轮磨损　切入点：面形精度　出处：《哈尔滨工业大学》2017年硕士论文　论文类型：学位论文

【摘要】：轴对称微结构光学功能元件以其小型、轻量、集成性好等特点,在先进光学系统中得到日益广泛的应用。目前正大力发展玻璃模压技术以实现微结构光学元件的大批量复制加工。但是工具的磨损限制了超硬模芯的加工效率与精度。本课题针对玻璃模压所需的碳化硅菲涅尔微结构模芯,通过研究模芯磨削中的砂轮磨损问题以及优化砂轮尖端角度和磨削工艺参数,以实现菲涅尔微结构模芯的高效高精度加工。使用树脂结合剂金刚石V形砂轮磨削碳化硅菲涅尔微结构表面,进行了砂轮磨损的基础实验研究,并分析了砂轮磨损形式。针对砂轮磨损引起的菲涅尔微结构中心残留凸台、台阶底角圆弧,台阶顶角过切等现象,进行了MATLAB仿真研究。通过理论分析及磨削实验,分析砂轮磨损对菲涅尔微结构面形精度和表面粗糙度的影响。选择了三种角度(45°、60°和75°)的V形砂轮进行碳化硅菲涅尔微结构的磨削加工实验,对砂轮尖端角度进行了优选研究。通过对比不同磨削阶段的砂轮磨损量、工件去除量及磨削比,研究砂轮尖端角度对砂轮抗磨损性能的影响。通过比较不同尖角砂轮磨削的菲涅尔微结构的面形精度和表面粗糙度,分析砂轮尖端角度对磨削加工精度的影响。设计单因素工艺参数磨削直线槽实验,分析了磨削宽度及水平方向进给速度对工件表面质量的影响。计算不同磨削工艺参数的磨削力和材料去除速率,选取磨削力与材料去除速率的比值来表征砂轮在该磨削工艺参数下的抗磨损性能。然后,通过扫描电子显微镜观察对比不同磨削工艺参数磨削的直线槽表面质量,优化磨削工艺参数。采用优化后的磨削工艺参数加工碳化硅菲涅尔微结构,工件表面粗糙度Ra小于10 nm,面形误差小于1μm,达到了微结构模芯所需的精度指标。说明通过砂轮磨损和工艺优化研究,成功地提高了菲涅尔微结构模芯的加工精度。
[Abstract]:Axisymmetric microstructural optical functional components are characterized by their small size, light weight, good integration, etc. It is widely used in advanced optical system. At present, glass molding technology is being developed vigorously to realize mass copying of microstructural optical elements. However, the wear of tools limits the machining efficiency and efficiency of superhard core. Precision. This topic aims at the silicon carbide Fresnel microstructural mould core needed for glass molding. In this paper, the grinding wheel wear problem in die core grinding and the optimization of grinding wheel tip angle and grinding process parameters are studied. In order to realize the high efficiency and high precision machining of Fresnel microstructural core, the grinding wheel with resin binder diamond V-shaped grinding wheel was used to grind the surface of Fresnel microstructure of silicon carbide, and the basic experimental study of grinding wheel wear was carried out. The wear pattern of grinding wheel is analyzed. The phenomena of Fresnel micro-structure center residual convex table, bottom arc of step and overtangling of top angle of step caused by wear of grinding wheel are studied by MATLAB simulation, through theoretical analysis and grinding experiment. The effect of grinding wheel wear on the surface precision and surface roughness of Fresnel microstructure was analyzed. Three V-shaped grinding wheels with 45 掳or 60 掳and 75 掳angle were selected for grinding Fresnel microstructure of silicon carbide. The optimum selection of grinding wheel tip angle is studied. The grinding wheel wear, workpiece removal and grinding ratio are compared in different grinding stages. The effect of grinding wheel tip angle on wear resistance of grinding wheel is studied. The surface shape accuracy and surface roughness of Fresnel microstructure grinding with different angle grinding wheels are compared. The influence of grinding wheel tip angle on grinding precision is analyzed. The influence of grinding width and horizontal feed speed on the surface quality of workpiece is analyzed. The grinding force and material removal rate of different grinding parameters are calculated. The ratio of grinding force to material removal rate is selected to characterize the wear resistance of grinding wheel under the grinding process parameters. Then, the surface quality of linear groove grinding with different grinding parameters is observed and compared by scanning electron microscope. The optimized grinding process parameters are used to fabricate the Fresnel microstructure of silicon carbide. The surface roughness Ra of the workpiece is less than 10 nm and the surface shape error is less than 1 渭 m. The precision index of the micro-structure die core is achieved. It is shown that the machining accuracy of the Fresnel micro-structure die core has been improved successfully through the grinding wheel wear and process optimization research.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG580.6;TG743

【相似文献】