Ti含量对非晶Ti-B基涂层的腐蚀及力学性能的影响

发布时间：2018-03-09 11:47

本文选题：非晶涂层　切入点：Ti含量　出处：《真空科学与技术学报》2017年01期 　论文类型：期刊论文

【摘要】：为了消除磁控溅射涂层的柱状晶结构,提高Ti-B基涂层的耐蚀防护性能。采用磁控溅射技术,通过成分调控和工艺调控,获得了不同Ti含量的非晶Ti-B涂层。利用X射线衍射、扫描电镜、纳米压痕仪、电化学工作站对涂层的结构和性能进行了分析。结果表明:所获得的不同Ti含量的涂层分别是44.5%,51.6%,55.3%(原子比);三种涂层均为非晶生长结构,XRD图线形状和变化趋势均相似;截面形貌差异不大,都为均匀致密的平滑结构。随着Ti含量的增加,Ti-B涂层的硬度逐渐减小,最小硬度为25.9 GPa,仍属于硬质涂层;涂层的塑性指数逐渐增大,最大为0.56。三种Ti含量的涂层对于基材SS304都具有耐蚀保护作用;随着Ti含量的增加,涂层的耐蚀性能逐渐提高,最小腐蚀电流密度为1.49×10-7A/cm2,比基材降低了大约1个数量级。通过研究,获得了综合性能较高的非晶二元系耐蚀硬质TiB基涂层。
[Abstract]:In order to eliminate the columnar structure of magnetron sputtering coatings and improve the corrosion resistance of Ti-B based coatings, amorphous Ti-B coatings with different Ti content were obtained by means of magnetron sputtering technique, composition control and process control. Scanning Electron Microscopy, Nanoindentation, The structure and properties of the coatings were analyzed by electrochemical workstation. The results showed that the coating with different Ti content was 44.55.51.6% and 55.3% (atomic ratio), the XRD patterns of the three coatings were all similar in shape and variation trend. With the increase of Ti content, the hardness of Ti-B coating decreases gradually, and the minimum hardness is 25.9 GPa.It is still a hard coating, and the plastic index of the coating increases gradually. The corrosion resistance of the coating is gradually improved with the increase of Ti content, and the minimum corrosion current density is 1.49 脳 10 ~ (-7) A / cm ~ (2), which is about 1 order of magnitude lower than that of the substrate. Amorphous binary TiB based coatings with high properties were obtained.
【作者单位】：上海大学材料科学与工程学院;中国科学院宁波材料技术与工程研究所;
【分类号】：TG174.4

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