滑移及黏度对超精密气浮工作台性能影响研究

发布时间：2018-03-18 21:15

  本文选题：气浮工作台　切入点：滑移　出处：《西安交通大学学报》2017年11期 　论文类型：期刊论文

【摘要】：针对超精密气浮工作台内部微小间隙气体的性能展开研究,实现了微尺度下气体滑移及黏度对气浮工作台性能影响的分析。基于气体润滑理论和微尺度下气体滑移和黏度的研究,实现了气浮工作台内气膜流态模型的修正,利用有限差分法给出了雷诺方程的数值求解过程;通过求解修正模型,分析不同供气压强和气膜间隙下,滑移和黏度对气浮工作台性能影响的机理。研究结果表明:气体滑移和黏度会引起气浮工作台承载力的降低和气膜刚度的增大,但不会改变供气压强和气膜间隙对工作台的影响趋势,只是影响程度发生改变,当同时考虑滑移和黏度时,承载力比忽略时降低最多(约为21.95%),最大刚度比忽略时提升最大(约为15%)。滑移和黏度的存在使得气浮工作台的实际性能最优参数小于理想的最优性能参数,最优气膜间隙由原来的10μm变为6μm。最后,通过试验验证发现,同时考虑气体滑移和黏度时,气浮工作台的性能最接近实际工况,承载力的仿真曲线与试验曲线最吻合,刚度的试验值与仿真值的误差约为9.59%。
[Abstract]:The performance of micro-gap gas in ultra-precision air floatation table is studied. The effect of gas slippage and viscosity on the performance of air floating table is analyzed. Based on the theory of gas lubrication and the study of gas slip and viscosity in micro scale, the model of gas film flow in air floating table is modified. The numerical solution process of Reynolds equation is given by the finite difference method, and the modified model is solved to analyze the different pressure of gas supply and the gap of gas film. The mechanism of the effect of slippage and viscosity on the performance of air floatation table. The results show that gas slip and viscosity will cause the reduction of bearing capacity and the increase of film stiffness. But it will not change the influence trend of air supply pressure and film clearance on the worktable, but the influence degree will change, when the slippage and viscosity are considered at the same time, The bearing capacity is much lower than the neglected one (about 21.95), and the maximum stiffness is the largest (about 15%). The existence of slippage and viscosity makes the actual performance optimum parameter of the air-floating table smaller than the ideal optimal performance parameter. The optimal film clearance is changed from 10 渭 m to 6 渭 m. Finally, it is found that the performance of the air floating table is the closest to the actual working condition, and the simulation curve of bearing capacity is the most consistent with the test curve when the gas slip and viscosity are taken into account at the same time. The error between the test value and the simulation value is about 9.59.
【作者单位】： 北京工业大学先进制造技术北京市重点实验室;
【基金】：国家自然科学基金资助项目(51475010,51105005)
【分类号】：TG502
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本文编号：1631337