钛表面多弧离子镀沉积TiSiCN涂层的结构及其磨蚀性能研究

发布时间：2018-04-01 14:35

本文选题：TiSiCN涂层　切入点：多弧离子镀　出处：《宁波大学》2017年硕士论文

【摘要】：钛合金质量轻、强度高、耐海水和海洋大气腐蚀,被认为是在严酷高湿热的海洋环境中最具有潜力的使役材料。但钛合金的耐磨损性能差,为适应快速发展舰艇、深潜器及海工装备的需求,开发集耐磨蚀和自润滑一体化的防护涂层材料非常迫切。具有超高硬度及优异的抗磨损性能的TiSiN涂层和具有优异的自润滑性能Ti_3SiC_2MAX相的材料受到广泛关注。本文采用多弧离子镀技术通过调控沉积参数制备高硬度、减磨耐磨的TiSiCN涂层。在此基础上,通过调控沉积偏压改变沉积过程中的粒子能量,探索制备非晶纳米晶与Ti_3SiC_2MAX相的耦合结构的TiSiCN涂层,建立物相结构和磨蚀性能的本构关系,并揭示涂层在海水中的失效机制。得到如下阶段性结论:1.TiSiCN涂层中包含TiN、TiC和Ti(C,N)纳米晶、非晶Si3N4和SiC及少量的非晶碳。2.当碳含量为11.9at.%时,TiSiCN涂层表现出最高的硬度(~39.8GPa)和优异的抗磨蚀性能。在大气环境下,由于涂层中的碳发生了类石墨化转变及转移致使碳含量为22.2at.%的TiSiCN涂层表现出优异的摩擦学性能。3.在海水中涂层的退化主要是由机械磨损造成的,而化学腐蚀对涂层的退化贡献不大,另外磨损与腐蚀之间的交互作用也是涂层退化的一个重要因素。4.偏压引起离子能量的变化对TiSiCN涂层的组织和性能影响显著,其中晶粒尺寸不断减小、压应力不断增大,随着沉积偏压的增加,涂层中的峰位也逐渐由TiN向TiC偏移。5.沉积偏压为-100V时,TiSiCN涂层具有非晶纳米晶(nc-TiN,TiC,Ti(C,N)/α-Si3N4,SiC)与少量Ti_3SiC_2MAX相的耦合结构,此时TiSiCN涂层表现出高硬度、优异的抗磨蚀性能。6.涂层结构完整没有形成贯穿式的裂纹时,保护电位的存在可以有效的保护涂层免受电化学腐蚀,然而当海水沿腐蚀通道浸入涂层接触到基底后,保护电位的存在则会加速涂层的退化。
[Abstract]:Titanium alloy is considered as the most potential material in the severe and high humid marine environment because of its light weight, high strength and corrosion resistance to sea water and ocean atmosphere. But the wear resistance of titanium alloy is poor, so it is suitable for the rapid development of ships. Requirements for deep submersible vehicles and marine engineering equipment, It is very urgent to develop the protective coating material with the integration of wear resistance and self-lubrication. The TiSiN coating with ultra-high hardness and excellent wear resistance and the material with excellent self-lubricating property Ti_3SiC_2MAX phase have been paid more and more attention. High hardness was prepared by controlling deposition parameters by multi-arc ion plating. On the basis of this, the particle energy in the deposition process was changed by adjusting the deposition bias voltage, and the TiSiCN coating with the coupling structure of amorphous nanocrystalline and Ti_3SiC_2MAX phase was prepared, and the constitutive relationship between the phase structure and the wear resistance was established. The failure mechanism of the coating in seawater is also revealed. The following conclusions are obtained: 1. TiSiCN coating contains TiN- TiC and TiC- (N) nanocrystalline. Amorphous Si3N4 and SiC and a small amount of amorphous carbon. When the carbon content is 11.9 at.%, the TiSiCN coating exhibits the highest hardness and excellent abrasion resistance. Due to the graphitization transition and transfer of carbon in the coating, the TiSiCN coating with a carbon content of 22.2 at.% exhibits excellent tribological properties .3.The degradation of the coating in seawater is mainly caused by mechanical wear. In addition, the interaction between wear and corrosion is also an important factor in the degradation of TiSiCN coatings. The change of ion energy caused by bias voltage has a significant effect on the microstructure and properties of TiSiCN coatings. The grain size is decreasing and the compressive stress is increasing. With the increase of deposition bias, the peak position in the coating shifts from TiN to TiC gradually. 5. When the deposition bias voltage is -100V, the TiSiCN coating has the coupling structure of amorphous nanocrystalline nc-TiCU / 伪 -Si3N4SiC) and a small amount of Ti_3SiC_2MAX phase. At this time, the TiSiCN coating exhibits high hardness and excellent wear resistance. 6. When the structure of the coating does not form a penetrating crack, the existence of the protective potential can effectively protect the coating from electrochemical corrosion. However, when seawater is immersed into the substrate along the corrosion channel, the existence of protective potential accelerates the degradation of the coating.
【学位授予单位】：宁波大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG174.4

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