直线导轨激光六自由度几何运动误差同时测量方法与系统的研究

发布时间：2018-04-25 13:44

本文选题：六自由度误差 + 外差干涉　；参考：《北京交通大学》2016年博士论文

【摘要】：直线轴或直线导轨是数控机床、加工中心和坐标测量机等高精密加工和测量设备的重要组成部件,其制造和装配误差是影响上述设备加工和测量精度的主要因素。激光干涉仪是检测直线导轨几何运动误差的常用仪器,但是其测量效率极低且无法满足数控机床多误差快速高精度测量的要求。因此,本领域亟待解决的问题和发展趋势是发展一种直线导轨六自由度几何运动误差同时测量的方法及相应的仪器设备,显著提高数控机床的检测效率和精度。为了解决上述问题,本论文在综合分析了国内外相关研究的基础上,依据小型化和高集成度的原则,提出了两种可用于数控机床直线导轨几何运动误差检测的六自由度误差同时测量的方案,研制了相应的测量仪器,通过一系列实验验证了所研制的测量系统的可靠性和有效性。概括起来,本学位论文的主要工作及创新有：1.提出了一种基于激光干涉和激光准直结合的六自由度几何运动误差同时测量的方法,分析了各自由度几何误差的测量原理并介绍了共路光线漂移测量和补偿的方法。根据所提出的测量原理进行了光路结构、信号处理单元和测量软件的设计,研制了基于He-Ne双频激光器和单模光纤耦合的半导体激光器的测量系统。通过一系列实验对所研制的测量系统的性能进行了评估,实验结果表明系统位置误差、直线度误差、俯仰角、偏摆角和滚转角测量的标准偏差分别为0.8μm、0.5pm、 0.5"、0.5"、 1",在700mm的测量范围内重复性误差的最大偏差分别为±0.6μm、 ±1.2μm.±1"、±0.8"、±1.8",证明了该系统能满足精密数控机床的检测要求。2.提出了一种基于外差干涉和激光光纤准直结合的六自由度几何运动误差同时测量方法。提出了基于单根保偏光纤传输双频激光的外差干涉位置误差测量。根据所提出的测量原理进行了光路结构、硬件和软件的设计,研制了利用单根保偏光纤耦合的He-Ne双频激光器的测量系统。通过一系列实验对所研制的测量系统的性能进行了评估,实验结果表明系统位置误差、直线度误差、俯仰角、偏摆角和滚转角测量的稳定性误差分别为31.1nm、60nm、0.04"、0.03"、0.29",直线度误差、俯仰角、偏摆角和滚转角测量的重复性误差分别为±0.15μm、±0.18”、±0.24”、±0.35”,证明了保偏光纤的应用对提升系统测量精度和热稳定性的有效性,验证了该系统适用于高精密数控机床的检测。3.讨论了六自由度几何运动误差同时测量系统的误差构成并详细分析了直线度误差测量的系统误差。根据理论分析和基于控制变量法的标定实验提出了一种修正测量分辨率变化的方法。利用棱镜展开原理和矩阵光线追迹建立了误差补偿模型,理论上消除了由制造误差和安装偏差、误差串扰引入的系统误差。分析了阿贝误差的产生原因和作用效果,介绍了基于齐次变换矩阵的阿贝误差的补偿模型。搭建了基于激光准直的直线度误差测量装置并与标准仪器进行了对比,实验结果表明补偿前后水平和竖直直线度误差测量的对比偏差分别由1.8μm和2.8μm降至0.9μm和0.8μm,证明了所建立的误差补偿模型的有效性。
[Abstract]:Linear or linear guide rail is an important component of high precision machining and measuring equipment such as CNC machine tools, machining centers and coordinate measuring machines. The manufacturing and assembly errors are the main factors affecting the machining and measuring accuracy of the above equipment. The laser interferometer is a common instrument for measuring the geometric motion error of the linear guide, but its measurement efficiency It is very low and unable to meet the requirements of fast and accurate measurement of multi error of CNC machine tools. Therefore, the problem and trend of development in this field are to develop a method of simultaneous measurement of geometric motion error of six degrees of freedom of linear guide and corresponding instrument and equipment, and improve the detection efficiency and accuracy of the NC machine bed significantly. On the basis of comprehensive analysis of relevant research at home and abroad, this paper puts forward two schemes for simultaneous measurement of six degrees of freedom error for geometric kinematic error detection of linear guide rail of CNC machine tools, which can be used to measure the geometric motion error of numerical control machine tools. The corresponding measuring instrument is developed and the measurement developed is verified by a series of experiments. The main work and innovation of this dissertation are as follows: 1. a method of simultaneous measurement of geometric motion error of six degrees of freedom based on laser interference and laser collimation is proposed. The measurement principle of geometric errors of each degree of freedom is analyzed and the square of common path ray drift measurement and compensation is introduced. Method. Based on the proposed measurement principle, the optical path structure, signal processing unit and measurement software are designed. The measurement system of semiconductor laser based on He-Ne dual frequency laser and single mode fiber coupling is developed. The performance of the developed measurement system is evaluated through a series of experiments. The experimental results show that the system position is wrong. The standard deviations of the error, the straightness error, the pitching angle, the deflection angle and the roll angle are 0.8 mu m, 0.5pm, 0.5 ", 0.5", 1 ", the maximum deviation of the repeatability error in the range of 700mm is + 0.6 mu m, + 1.2 mu m. + 1", + 0.8 ", + 1.8", which proves that the system can meet the requirements of the precision NC machine tool and put forward a kind of outside based on the outside. A simultaneous measurement of six degrees of freedom geometric motion error combined with differential interference and laser collimation. A measurement of heterodyne interference position error based on Dan Genbao biased optical fiber transmission dual frequency laser is proposed. Based on the proposed measurement principle, the optical path structure, hardware and software are designed, and the He-Ne coupling of single polarization optical fiber is developed. The measurement system of a dual frequency laser. The performance of the developed measurement system is evaluated through a series of experiments. The experimental results show that the stability errors of the system position error, the straightness error, the pitching angle, the deflection angle and the roll angle are 31.1nm, 60NM, 0.04, 0.03, 0.29 ", straightness error, pitching angle, deflection angle and roll angle. The repeatability error of the measurement is + 0.15 mu m, + 0.18 ", + 0.24, + 0.35". It is proved that the application of the polarization preserving fiber is effective to the measurement accuracy and thermal stability of the lifting system. It is proved that the system is suitable for the detection of high precision CNC machine tools, and the error composition of the simultaneous measurement system of geometric motion error of six degrees of freedom is discussed and detailed. The systematic error of measurement of straightness error is analyzed. A method of correcting the change of measurement resolution is proposed based on the theoretical analysis and the calibration experiment based on the control variable method. The error compensation model is established by using the prism expansion principle and the ray tracing of the matrix, which is theoretically eliminated by the error and installation deviation and the error crosstalk. The cause and effect of A Bei error are analyzed. The compensation model of A Bei error based on homogeneous transformation matrix is introduced. A straightness error measuring device based on laser collimation is set up and compared with the standard instrument. The experimental results show that the measurement of horizontal and vertical straightness error before and after compensation deviation is biased. The difference is reduced from 1.8 m and 2.8 m to 0.9 m and 0.8 m respectively, which proves the validity of the established error compensation model.

【学位授予单位】：北京交通大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TG659

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