纳米级精度的竖直液体静压滑台设计

发布时间：2018-04-25 22:06

本文选题：液体静压滑台 + 超精密竖直滑台　；参考：《光学精密工程》2017年08期

【摘要】：为了满足航天关键件的加工精度要求,需要设计并制造满足设计要求的纳米级精度的竖直液体静压滑台。本文针对滑台结构、关键部件及公差设计方法展开了研究。首先,根据高精度竖直滑台的设计要求,采用不等流量的滑块结构及控制方法整体设计滑台结构。设计时,将所有液压油管路均设置在滑块中,以减小油压损耗,且使得滑台结构紧凑。接着,为使圆孔加工时圆度误差不受导轨刚度的影响,采用等导轨刚度的设计方法,同时给出了该方法下油膜厚度、刚度、压力的计算方法。文中还证明了上下油腔不等承载面积法能够降低竖直滑台由于倾覆力矩产生的倾角误差,提高导轨运动精度。在此基础上,提出了基于不等流量结构的几何精度设计方法,计算并证明了不等流量的结构和控制方法可以降低导轨和滑块极高的制造等级要求和制造成本。最后,根据上述设计方法设计并制造了数控纳米曲面磨床竖直滑台,并测试了该磨床竖直Z滑台的运动精度。结果显示采用不等流量结构的滑台制造公差要求由IT1降低到IT3。Z滑台精度测试结果为:定位误差为±80nm,重复定位误差为48nm。
[Abstract]:In order to meet the requirement of machining precision of key parts in space, a vertical hydrostatic hydrostatic sliding table with nanometer precision is designed and manufactured. In this paper, the structure, key components and tolerance design method of slide platform are studied. Firstly, according to the design requirements of the high precision vertical sliding table, the sliding block structure with unequal flow rate and the control method are adopted to design the sliding table structure as a whole. In order to reduce the oil pressure loss and make the slide table compact, all hydraulic oil pipes are arranged in the slider block. Then, in order to ensure that roundness error is not affected by the stiffness of guide rail, the design method of equal guide rail stiffness is adopted, and the calculation method of oil film thickness, stiffness and pressure under this method is given. It is also proved that the unequal bearing area method of the upper and lower oil cavities can reduce the inclination error caused by the overturning moment of the vertical slide table and improve the motion accuracy of the guide rail. On this basis, a geometric precision design method based on unequal flow structure is proposed. It is proved that the structure and control method of unequal flow can reduce the high manufacturing grade requirement and manufacturing cost of guide rail and slider. Finally, according to the above design method, the vertical sliding table of NC nano-curved grinding machine is designed and manufactured, and the motion accuracy of the vertical Z sliding table of the grinding machine is tested. The results show that the tolerance of sliding table with unequal flow structure is reduced from IT1 to IT3.Z. The results show that the positioning error is 卤80nm, and the repeat positioning error is 48nm.
【作者单位】：东华大学机械工程学院;密歇根大学S.M.Wu制造中心;
【基金】：国家自然科学基金资助项目(No.51675096)
【分类号】：TG502.1

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