CVD金刚石微铣刀的研磨抛光研究

发布时间：2018-04-30 01:14

本文选题：微细制造 + CVD金刚石　；参考：《南京航空航天大学》2016年硕士论文

【摘要】：微细制造在工业上有着广泛的用途,随着微细制造的发展越来越多的微型产品被加工生产出来,与此同时微细刀具的重要性也与日俱增。使用锋利的金刚石微细刀具所加工出的工件表面光洁度高,质量可靠,且加工效率也较高。在金刚石类微细刀具中,聚晶金刚石刀具和金刚石涂层刀具已经得到广泛应用,然而由于纯金刚石材料难加工的特性,使得CVD金刚石微铣刀的研究相比之下进展缓慢,研究较少。本文以CVD金刚石微铣刀的制备和刃磨为研究对象,采用化学机械方法进行刃磨试验并进行了刀具成形的试验研究,在刃磨中保证刃口质量而在成形制备中保证材料的去除率。主要研究内容如下:(1)使用数控刀具磨床进行刀具的刃磨试验。分别使用铜基碳化钨盘和铝基碳化硅盘对CVD金刚石微铣刀进行刃磨。铜基碳化钨盘促进金刚石的氧化反应,在刃磨后获得的刀具刃口半径较小。通过不同试验参数下刃磨质量的比对,优化选择较好的研磨方向、速度和进给速率。(2)为了寻找更好的刀具底刃成形制备方式,自行设计了一套研磨抛光刀具的装置并利用该装置结合铁盘、大颗粒度金刚石砂轮对金刚石微细铣刀进行了试验研究。(3)通过不同参数下抛光效率的对比试验,证明了高转速铁盘的抛光效率较高,同时发现大粒度金刚石砂轮的研磨效果最好,比较适用于CVD金刚石微铣刀的初期成形制备。(4)利用铜基碳化钨盘优化的参数加工的CVD金刚石微铣刀,刃口钝圆半径最优可达到2.5μm。
[Abstract]:Micro manufacturing has been widely used in industry. With the development of micro manufacturing, more and more micro products are processed and produced. At the same time, the importance of micro cutting tools is increasing. The surface of the workpiece machined by using the sharp diamond fine cutting tool has high surface finish, reliable quality and high machining efficiency. Polycrystalline diamond cutting tools and diamond-coated tools have been widely used in diamond-like micro-cutters. However, due to the difficult processing of pure diamond materials, the research on CVD diamond micro-milling cutters is slow. Less research has been done. In this paper, the preparation and grinding of CVD diamond micro-milling cutter are taken as the research object, the grinding experiments are carried out by means of chemical mechanical method and the experimental study of tool forming is carried out. The cutting edge quality is guaranteed in the grinding process and the material removal rate is guaranteed in the forming preparation. The main research contents are as follows: (1) NC tool grinder is used for tool grinding test. CVD diamond micromilling cutters were sharpened by copper-based tungsten carbide disk and aluminum-based silicon carbide disc respectively. The copper based tungsten carbide disk promotes the oxidation reaction of diamond, and the cutting edge radius is smaller after grinding. According to the comparison of grinding quality under different test parameters, the better grinding direction, speed and feed rate. A set of grinding and polishing tool equipment was designed by ourselves and the diamond micro-milling cutter with large particle size diamond grinding wheel was used to test the polishing efficiency under different parameters by using the device combined with iron disc and diamond grinding wheel with large particle size. It is proved that the polishing efficiency of high rotating speed iron disc is high and the grinding effect of large grain diamond grinding wheel is the best. Compared with the CVD diamond micromilling cutter, which is suitable for the initial forming of CVD diamond micromilling cutter, the cutting edge obtuse radius of CVD diamond micro-milling cutter can reach 2.5 渭 m by using the optimized parameters of copper based tungsten carbide disk.
【学位授予单位】：南京航空航天大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TG714;TG580.6

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