飞秒激光诱导钛合金表面涂层特性研究

发布时间：2018-05-01 10:13

本文选题：激光诱导前向转移 + 飞秒激光　；参考：《中国民航大学》2016年硕士论文

【摘要】：通过激光的诱导作用实现微量物质的转移是一项新的激光加工技术。飞秒激光具有脉宽极短,峰值功率极高的特点,与材料作用的机理不同于普通长脉冲激光。本文选择飞秒激光作为加工光源,采用激光诱导前向转移技术,在钛合金表面转移沉积SiC薄膜和NiCoGrAl-Y2O3薄膜,对不同实验参数下的薄膜的转移规律进行研究。寻找合适的实验参数,在钛合金表面制备SiC涂层,对转移后的涂层进行分析。主要研究内容如下:制备了符合EB-PVD实验标准的Ni CoGrAl-Y2O3靶材,采用电子束蒸发镀膜系统在石英片上制备了不同厚度SiC薄膜和NiCoGrAl-Y2O3薄膜,对薄膜进行物相分析,测试结果表明采用电子束轰击靶材进行薄膜制备时,材料从晶态向非晶态发生转变。实验对NiCoGrAl-Y2O3薄膜和Si C薄膜进行了飞秒激光诱导转移,总结了扫描速度,飞秒激光功率,离焦距离,薄膜厚度对薄膜的转移沉积规律。结果表明:在激光能量足够高且一定的条件下,为了保证沉积薄膜具有较好的搭接率,对扫描速度有一定要求,通过改变离焦的方式,增加有效光斑直径,在改善沉积薄膜搭接率的同时能够增加沉积薄膜的线宽,提高扫描速度,从而提高加工效率;激光功率选择有一个较合适的范围,激光功率较小时,沉积薄膜线宽较小甚至无法转移薄膜,当激光功率较大,在薄膜转移的同时,会对基底材料造成烧蚀。实验上首次利用飞秒激光成功实现SiC薄膜的转移沉积,在钛合金表面制备了碳化硅涂层。研究表明:涂层组织没有出现裂纹;SiC薄膜在转移的过程,有了一定程度的结晶;SiC涂层与钛合金基底形成了紧密结合。
[Abstract]:It is a new laser processing technology to transfer trace matter by laser induction. Femtosecond laser has the characteristics of very short pulse width and high peak power, and the mechanism of interaction with material is different from that of ordinary long pulse laser. In this paper, femtosecond laser is chosen as the processing light source. The SiC and NiCoGrAl-Y2O3 films are deposited on the surface of titanium alloy by laser induced forward transfer technique. The transfer law of the films under different experimental parameters is studied. SiC coating was prepared on titanium alloy surface with suitable experimental parameters, and the transferred coating was analyzed. The main research contents are as follows: the Ni CoGrAl-Y2O3 target which meets the standard of EB-PVD experiment was prepared. SiC and NiCoGrAl-Y2O3 thin films of different thickness were prepared on quartz substrates by electron beam evaporation coating system. The phase of the films was analyzed. The results show that when the target is prepared by electron beam bombardment, the material changes from crystalline state to amorphous state. Femtosecond laser induced transfer was carried out on NiCoGrAl-Y2O3 and sic thin films, and the transfer and deposition rules of scanning speed, femtosecond laser power, defocus distance and film thickness on the films were summarized. The results show that under the condition of high enough laser energy and certain laser energy, the effective spot diameter is increased by changing the mode of defocusing in order to ensure the better lap rate of the deposited film and the scanning speed. At the same time, it can increase the linewidth of the deposited film and improve the scanning speed, thus improving the processing efficiency, the laser power selection has a more suitable range, the laser power is small. When the laser power is high, the thin film will be ablated while the film is transferred. The transfer deposition of SiC thin films was successfully realized by femtosecond laser for the first time, and silicon carbide coating was prepared on the surface of titanium alloy. The results show that there is no crack in the microstructure of the coating, and there is a certain degree of crystalline sic coating to form a tight bond with the titanium alloy substrate.
【学位授予单位】：中国民航大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TG174.4

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