超精密机床静压气浮导轨表面微结构设计研究

发布时间：2018-05-05 15:05

本文选题：超精密机床 + 气浮导轨表面　；参考：《机械工程学报》2017年03期

【摘要】：以减少超精密机床气浮导轨高速运动时气体阻力为设计目标,应用雷诺平均方程(Reynolds-averaged Navier Stokes equations,RANS)和带旋流修正的k-ε湍流模型,建立导轨微结构功能表面流体动力学减阻分析模型。采用减阻机理分析与仿真方法对比分析矩形沟槽、V形沟槽、U形沟槽、Space-V沟槽等四种微结构表面构型,确定最适合超精密机床气浮导轨表面减阻需求的构型是V形沟槽结构表面。继而对V形沟槽表面几何参数进行优化设计,获得优化的沟槽角度、宽度、间距设计参数,确定最优超精密机床静压气浮导轨微结构功能表面。该设计研究可用于进一步保障超精密机床设计精度和运动精度。
[Abstract]:With the aim of reducing the gas resistance of the air floating guideway when the ultra-precision machine tool is moving at high speed, the drag reduction analysis model of the functional surface hydrodynamics of the guide rail with micro-structure is established by using the Reynolds average equation, Reynolds average Navier and Stokes equationsRANSs) and the k- 蔚 turbulence model with swirl modification. The drag reduction mechanism analysis and simulation method are used to compare and analyze the surface configurations of four kinds of microstructures, such as rectangular grooves, V-grooves, U-grooves and Space-V grooves. It is determined that the most suitable configuration for drag reduction on the surface of air-floating guideways of ultra-precision machine tools is the V-groove structural surface. Then the geometric parameters of V-shaped grooves are optimized, and the optimum design parameters of groove angle, width and spacing are obtained, and the functional surface of the micro-structure of the hydrostatic air floating guideway of the ultra-precision machine tool is determined. The design research can be used to further guarantee the design accuracy and motion accuracy of ultra-precision machine tools.
【作者单位】：上海理工大学机械工程学院;上海航天控制技术研究所;哈尔滨工业大学机电学院;
【基金】：国家自然科学基金资助项目(51405300)
【分类号】：TG502.1

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