沉积温度对化学气相沉积铼涂层性能的影响

发布时间：2018-05-20 22:04

本文选题：铼 + 化学气相沉积　；参考：《稀有金属材料与工程》2017年05期

【摘要】：利用五氯化铼热分解反应,采用冷壁式现场氯化化学气相法在钼基体沉积铼涂层,分析不同沉积温度对铼涂层的物相组成、沉积规律、表面形貌、密度和硬度的影响。实验结果表明:沉积所得均为纯铼涂层,晶粒生长方向均以(002)晶面为主;随着沉积温度的上升,铼涂层的沉积速率和沉积效率大幅提升,表面形貌由复杂多面体态变为六棱锥状;涂层组织致密,相对密度最高可达99.9%,维氏硬度随沉积温度升高而升高,最高达6100 MPa。
[Abstract]:Rhenium coating was deposited on molybdenum substrate by cold wall chlorination chemical vapor method using thermal decomposition reaction of rhenium pentachloride. The effect of deposition temperature on phase composition, deposition law, surface morphology, density and hardness of rhenium coating was analyzed. The experimental results show that all the deposited rhenium coatings are pure rhenium coatings, and the grain growth direction is mainly in the direction of 002) crystal surface, and the deposition rate and deposition efficiency of rhenium coatings increase greatly with the increase of deposition temperature. The surface morphology of the coating changed from complex polyhedron to hexagonal, the microstructure of the coating was dense, the highest relative density was 99.9 and the Vickers hardness increased with the increase of deposition temperature, up to 6100 MPA.
【作者单位】：昆明贵金属研究所稀贵金属综合利用新技术国家重点实验室;
【基金】：国家自然科学青年基金(51201076) 国家自然科学基金(51361014) 云南省应用基础研究(2012FB194) 云南省技术创新人才(2013HB112)
【分类号】：TG174.44

【相似文献】