金刚石纳米印压成孔装置开发及试验研究

发布时间：2018-05-25 00:35

本文选题：单侧超微孔 + 纳米印压　；参考：《长春理工大学》2017年硕士论文

【摘要】：随着科学技术的不断发展,大深径比超微孔应用越来越广泛。目前,在国外大深径比超微孔加工技术已经达到很高水平。在国内,此技术也在不断发展,但大深径比的超微孔加工仍是个难题。本文提出一种单侧超微孔成形方法,通过金刚石刀尖钝圆的微尺度作用对硬基底效应下的金属薄片压透成孔。这种方法加工的微孔可以应用于超声波测漏仪上,因此,研究单侧超微孔加工方法具有十分重要的价值和意义。本文首先对材料的微观滑移到宏观断裂进行了理论研究,对金属变形断裂与声发射信号之间的关系进行理论分析。设计出载有声发射传感器、力传感器和微视频显微镜的多传感器的金刚石纳米印压成孔装置。根据试验需要,对各个传感器的型号进行选择,并搭建载有多传感器的试验平台。然后,进行金刚石纳米印压试验的试验方案设计,通过大量的工艺对比试验,确定压头压入速率、压头停留时间和压头圆锥角度数对试验结果的影响规律;对不同硬度的材料分别进行压孔试验,结合材料的属性,研究金属材料塑性对压孔试验的影响规律;对压孔过程中的压头倾斜量的计算和压入过程中玻璃基底的弹性变形量进行理论研究分析;总结出金刚石纳米压孔的最佳试验工艺参数。最后,通过大量试验结果对比分析,既验证了金刚石纳米印压成孔试验装置的可行性,又获得了金刚石纳米印压成孔的成形规律,为金刚石纳米印压成孔技术的进一步研究奠定了基础。
[Abstract]:With the development of science and technology, the application of large aspect ratio ultramicro hole is more and more extensive. At present, the processing technology of large depth to diameter ratio ultramicro hole has reached a very high level in foreign countries. In China, this technology is also developing, but the processing of ultrafine hole with large aspect ratio is still a difficult problem. In this paper, a method of forming a single side ultrafine hole is presented, in which the thin metal sheet under the hard substrate effect is compacted into holes by the microscale action of the blunt circle of diamond knife tip. This method can be used in ultrasonic leak detector. Therefore, it is of great value and significance to study the machining method of single side micro hole. In this paper, the relationship between metal deformation fracture and acoustic emission signal is analyzed theoretically. A multi-sensor diamond nano-impression hole forming device with acoustic emission sensors force sensors and micro-video microscopes was designed. According to the needs of the test, the model of each sensor is selected, and a multi-sensor test platform is built. Then, the experimental scheme of diamond nano-stamping test is designed. Through a large number of process contrast tests, the influence of indenter rate, head residence time and cone angle number on the test results is determined. The influence of metal material plasticity on the pore pressing test was studied by hole pressing test of different hardness materials, combined with the properties of the material. The calculation of head tilt during hole pressing and the elastic deformation of glass substrate during pressing are studied and analyzed theoretically, and the optimum experimental technological parameters of diamond nano-hole pressing are summarized. Finally, through the comparison and analysis of a large number of experimental results, the feasibility of the diamond nano-printing hole forming test device is verified, and the forming law of diamond nano-printing hole forming is obtained. It lays a foundation for the further study of diamond nano-lithography.
【学位授予单位】：长春理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG669

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