基于视觉引导的三维纳米触发测头系统的研究

发布时间：2018-05-29 01:46

本文选题：微纳米三坐标测量机 + 三维谐振触发测头　；参考：《合肥工业大学》2017年硕士论文

【摘要】：随着科学技术的进步,超精密加工技术的精度已经可以达到纳米级别,这些超精密元器件对微纳米尺度的测量提出了更高的要求。传统的三坐标测量机已经无法适用,因此微纳米三坐标测量机(Micro-Nano Coordinate Measuring Machine,简称微纳米CMM)已经成为当今测量领域研究的热门课题。而作为微纳米CMM的核心部件,微纳米CMM测头的研究显得尤为重要。国内外研究机构在微纳米CMM测头的研究上,已经取得了一定的科研成果,但是面对高测量效率、高精度、低测量力、具有三维空间测量能力等苛刻的要求,目前仍然没有较为成熟的解决方案。本文针对现有的微纳米CMM测头测量效率低、测量精度低、测量力大等问题,提出了一种基于视觉引导的三维谐振触发测量方案,并根据该方案设计了三维谐振触发测头系统。该测头系统在三维方向上都具有小于1nm的触发分辨力,小于10μN的测量力,可以实现对微结构试样形貌的空间三维触发测量。本文主要介绍的研究工作有:1.三维触发测量的理论模型的建立:本文分析了三维谐振触发测头与被测物体表面动态接触的力学模型,在介观尺度上研究和分析了测头在三维方向上的触发机理,建立了Z方向上轻敲模式(tapping mode),X(Y)方向上摩擦模式(friction mode)的理论,使用matlab对运动模型进行模拟仿真,并对仿真的结果进行实验论证。2.系统软件的编写:结合视觉系统的引导,本测头系统具有自动逼近试样的能力,从而达到高测量效率的目的。利用C++语言在VS编程环境下编写测头系统控制软件,主要实现测头系统性能测试、机器视觉引导逼近、三维自动测量等功能。3.实验测试:针对搭建的测头系统原型机,进行接近力曲线和触发重复性误差等测量实验,由此得到该触发测头的性能指标。并且,用该测头系统对微孔试样和柴油机喷油嘴针阀体喷孔进行三维形貌测量,从而验证该测头系统是否具有三维形貌测量的能力。
[Abstract]:With the development of science and technology, the precision of ultra-precision machining technology has reached the nanometer level. These ultra-precision components have put forward higher requirements for the measurement of micro-nanometer scale. Traditional CMMs can not be used, so Micro-Nano Coordinate Measuring Machine, (Micro-Nano-CMM) has become a hot topic in the field of measurement. As the core component of micro-nano CMM, the research of micro-nano CMM probe is particularly important. Research institutions at home and abroad have made some achievements in the research of micro and nano CMM probe, but in the face of high measuring efficiency, high precision, low measuring force and so on, there are harsh requirements such as three-dimensional spatial measurement ability. At present, there is still no more mature solution. In order to solve the problems of low measuring efficiency, low measuring precision and large measuring force, a three dimensional resonant trigger measurement scheme based on vision guidance is proposed in this paper. According to this scheme, a three dimensional resonant trigger probe system is designed. The system has less trigger resolution than 1nm and less than 10 渭 N in 3D direction. The main research work introduced in this paper is 1: 1. The establishment of theoretical model of 3D trigger measurement: this paper analyzes the mechanical model of dynamic contact between 3D resonant trigger probe and measured object surface, and studies and analyzes the triggering mechanism of probe in 3D direction on mesoscopic scale. The theory of friction mode friction mod in Z direction is established. The motion model is simulated by matlab, and the simulation results are proved by experiment. System software writing: combined with the guidance of visual system, the probe system has the ability to approach the sample automatically, so as to achieve the purpose of high measuring efficiency. The control software of probe system is programmed by C language in vs programming environment. The functions of performance test, machine vision guided approach, 3D automatic measurement and so on are mainly realized. Experimental test: according to the prototype machine of the probe system, the near force curve and the repeatability error of trigger are measured, and the performance index of the trigger probe is obtained. In addition, the microporous sample and the injection nozzle valve body were measured by the probe system to verify whether the probe system has the ability of 3D shape measurement.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG806

【参考文献】