强脉冲离子束辐照金属材料烧蚀产物特性分析

发布时间：2018-06-02 09:34

本文选题：强脉冲离子束 + 烧蚀　；参考：《物理学报》2017年05期

【摘要】：强脉冲离子束作为一种闪光热源在材料表面改性方面具有广泛的应用.烧蚀效应对于强脉冲离子束与物质相互作用以及强脉冲离子束薄膜沉积过程具有重要的影响.因此,分析强脉冲离子束的烧蚀过程和机理对于优化其应用具有重要意义.为了研究强脉冲离子束的烧蚀产物特性,采用1.2—1.5 J/cm~2的强脉冲离子束辐照纯锌靶材,并使用单晶硅片收集辐照过程中产生的烧蚀产物.通过扫描电子显微镜、能谱仪和高精度天平的分析与测量,得到了烧蚀产物的表面形貌和相关特性等实验结果.结合实验和有限元模拟计算得到的材料表面温度场分布演化结果,可以证明在强脉冲离子束辐照锌靶材的烧蚀过程中会有气态、液态和固态三种不同状态的烧蚀产物产生.
[Abstract]:As a flash heat source, strong pulsed ion beam has been widely used in surface modification of materials. The ablation effect plays an important role in the interaction of strong pulsed ion beam with matter and the deposition process of strong pulsed ion beam film. Therefore, it is important to analyze the ablation process and mechanism of intense pulsed ion beam for optimizing its application. In order to study the characteristics of ablation products of intense pulsed ion beams, 1.2-1.5 J/cm~2 intense pulsed ion beams were used to irradiate pure zinc targets, and monocrystalline silicon wafers were used to collect ablative products produced during irradiation. Through the analysis and measurement of scanning electron microscope, energy spectrometer and high precision balance, the surface morphology and related properties of ablative products were obtained. Combined with the results of experimental and finite element simulation, it can be proved that there are three kinds of ablation products in different states of liquid and solid in the ablation process of zinc target irradiated by strong pulsed ion beam.
【作者单位】：北京航空航天大学物理科学与核能工程学院;北京航空航天大学先进核能材料与物理北京市重点实验室;北京大学重离子物理研究所;
【基金】：国家自然科学基金(批准号:11175012) 国家科技重大专项(批准号:2013GB109004)资助的课题~~
【分类号】：TG178

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