亲水性固结磨料研磨垫自修整性能定量研究

发布时间：2018-06-20 06:17

本文选题：固结磨料研磨垫 + 亲水性　；参考：《南京航空航天大学》2017年硕士论文

【摘要】：随着微电子、光电子、传感器技术和材料技术的不断发展,各类光学材料得到了广泛应用,同时也对光学材料的超光滑无损伤加工提出了更高的要求。传统固结磨料研磨抛光技术由于结合剂的硬度较大,加工光学材料时易产生较大的损伤层,严重影响光学材料的加工效率和使用性能,由此亲水性固结磨料研磨抛光技术应运而生。自修整性能作为亲水性固结磨料研磨抛光垫(FAP)最主要的特性之一,直接影响着加工效率和被加工工件的表面质量。本文采用理论分析与试验探索相结合的方法,建立亲水性FAP自修整性能与主要影响因素之间的定量关系。主要完成的工作有:(1)探索了亲水性FAP自修整性能的实现途径,建立亲水性FAP自修整过程模型,初步确定亲水性FAP自修整性能的影响因素。通过单因素试验,探索因素水平对亲水性FAP自修整性能的影响。研究表明:材料硬脆性增大、研磨压力提高、金刚石粒径增加,亲水性FAP自修整性能提高;随着FAP中铜粉含量、研磨液中三乙醇胺含量、孔隙率的增加,亲水性FAP自修整性能先增加后降低。(2)将工件材料去除速率变化率作为评价指标,采用回归正交试验方法,探索亲水性FAP自修整性能与工件材料特性(脆-塑转变临界切深)、研磨压力、金刚石粒径、孔隙率、研磨液中三乙醇胺含量之间的定量关系,建立亲水性FAP自修整性能的回归方程。对研磨过程磨屑尺寸形状进行统计分析,探索磨屑对亲水性FAP自修整性能的影响。结果表明:工件材料特性、孔隙率、孔隙率与研磨压力的交互作用对亲水性FAP自修整性能影响较大;随着研磨加工的持续,磨屑尺寸减小,亲水性FAP自修整性能降低。(3)采用正交试验的方法,探索工件材料特性、研磨压力、孔隙率、基体强度弱化率等因素在多水平下对亲水性FAP自修整性能的影响。同时,将亲水性FAP自修整性能与被加工工件的表面质量联系起来。研究表明:工件材料脆性大、研磨压力高,亲水性FAP自修整过程容易实现;亲水性FAP具备较好自修整能力,被加工工件的表面质量较高。
[Abstract]:With the development of microelectronics, optoelectronics, sensor technology and material technology, all kinds of optical materials have been widely used, and higher requirements for ultra-smooth and non-damage processing of optical materials have been put forward. Because of the high hardness of binder, the traditional abrasive grinding and polishing technology is easy to produce a large damage layer when processing optical materials, which seriously affects the processing efficiency and performance of optical materials. Therefore, the hydrophilic consolidation abrasive grinding and polishing technology emerged as the times require. Self-dressing, as one of the most important properties of hydrophilic bonded abrasive grinding and polishing pad (FAPs), directly affects the processing efficiency and the surface quality of the workpiece being processed. In this paper, the quantitative relationship between hydrophilic FAP self-dressing performance and main influencing factors is established by combining theoretical analysis with experimental exploration. The main work accomplished is: (1) explore the way to realize hydrophilic FAP self-dressing, establish the hydrophilic FAP self-dressing process model, and preliminarily determine the influencing factors of hydrophilic FAP self-dressing performance. The effect of factor level on hydrophilic FAP self dressing performance was investigated by single factor test. The results show that the self-dressing property of hydrophilic FAP increases with the increase of hard brittleness, grinding pressure, diameter of diamond and the content of copper powder, triethanolamine content and porosity of grinding solution. The self-dressing property of hydrophilic FAP was firstly increased and then decreased. (2) the change rate of material removal rate of workpiece was taken as the evaluation index, and the regression orthogonal test method was used. The quantitative relationship between hydrophilic FAP self-dressing properties and workpiece material properties (critical cutting depth of brittle plastic transition, grinding pressure, diamond particle size, porosity, triethanolamine content in grinding fluid) was investigated. The regression equation of hydrophilic FAP self-dressing was established. The size and shape of abrasive debris in grinding process were statistically analyzed to explore the effect of debris on hydrophilic FAP self-dressing performance. The results show that the properties of workpiece, the interaction of porosity and grinding pressure have great influence on the self-dressing properties of hydrophilic FAP, and the size of debris decreases with the continuous grinding process. The effects of the properties of workpiece material, grinding pressure, porosity and matrix strength weakening rate on the self-dressing properties of hydrophilic FAP were investigated by orthogonal test. At the same time, the hydrophilic FAP self-dressing performance is related to the surface quality of the workpiece. The results show that the workpiece material is brittle, the grinding pressure is high, the hydrophilic FAP self-dressing process is easy to realize, the hydrophilic FAP has better self-dressing ability, and the surface quality of the workpiece is higher.
【学位授予单位】：南京航空航天大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG580.68

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