压电驱动微点胶器的控制与实验

发布时间：2018-06-24 13:22

本文选题：微点胶器 + 多物理场　；参考：《光学精密工程》2016年05期

【摘要】：针对微型器件封装对非接触式微胶量的需求,研制了压电驱动微点胶器,利用压电陶瓷管挤压毛细管产生的瞬时变形实现了微胶滴的分配。分析了毛细管内的流体行为及液滴形成条件;基于多物理场耦合的方法,建立了压电微喷的三设备(压电陶瓷、毛细管、胶体)耦合模型。然后,讨论了驱动电压、喷嘴直径、胶体黏度对控制胶滴形成的影响。在构建的实验平台上,开展了控制胶滴形成的实验研究。分析了多控制参数(喷嘴直径、胶体黏度、电压幅值、脉冲宽度)的复合作用,通过匹配相应的参数实现了pL级微胶滴的非接触式分配。实验结果显示:使用黏度为30mPa·s胶体,直径为10μm的喷嘴,在驱动电压幅值为50V,脉冲宽度为37μs等参数配置下,可获得最小胶滴的体积为8.31pL。实验结果验证了所提出方法和研制工具的有效性。
[Abstract]:In view of the requirement of micro device packaging for non-contact microgel, a piezoelectric microgel device is developed. The distribution of microgel droplets is realized by the instantaneous deformation produced by the piezoceramic tube extrusion capillary. The fluid behavior and droplet formation conditions in the capillary are analyzed. Based on the method of multi physical field coupling, the three setting of piezoelectric microjet is established. The effects of the driving voltage, nozzle diameter and colloid viscosity on the formation of droplets were discussed. An experimental study on the formation of droplets was carried out on the experimental platform. The composite effects of the multiple control parameters (nozzle straight diameter, colloid viscosity, voltage amplitude, pulse width) were analyzed. The non contact distribution of pL level microgel droplets is realized by matching the corresponding parameters. The experimental results show that the volume of the minimum droplet can be obtained by using the nozzle with the viscosity of 30mPa s colloid and the diameter of 10 u m, with the driving voltage amplitude of 50V and the pulse width of 37 u s. The results of the proposed method and development are verified by the experimental results. The validity of it.
【作者单位】：哈尔滨工业大学机器人技术与系统国家重点实验室;
【基金】：国家自然科学基金委员会创新研究群体科学基金项目支持(No.51521003) 机器人技术与系统国家重点实验室(哈尔滨工业大学)自主研究课题(No.SKLRSZ01602C)
【分类号】：TG95

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