高能电子束活性区空间能量密度测量系统
发布时间：2018-07-24 22:01
【摘要】：在分析电子束流高能特点基础上研究束流信号检测和测量方法,提出小角度电子束磁控偏转扫描采集方案,在高温难熔钨板上设计直径25μm的小孔传感器,建立信号检测装置和控制流程,共享60 MHz时钟保证扫描与采集同步,将透过小孔的电子强度转换成电压信号,经高频A/D采样和量化后高速传输到内存,对电子束单层截面信号可视化重构后依能量等级进行划分和能量密度分布计算,通过不同高度的多层数据重构活性区体模型,分割空间能量等值面形成序列能量曲面,标定能量峰值90%的空间区域为活性区焦斑.文中的软硬件系统能够有效应用于电子束品质评价.
[Abstract]:On the basis of analyzing the characteristics of electron beam high energy, the beam signal detection and measurement method is studied. A small angle electron beam magnetron deflection scanning acquisition scheme is proposed. A small hole sensor with a diameter of 25 渭 m is designed on a high temperature refractory tungsten plate. Set up signal detection device and control flow, share 60 MHz clock to ensure scanning and acquisition synchronization, convert electronic intensity through hole into voltage signal, transfer to memory at high speed after sampling and quantization of high frequency A / D, After visualized reconstruction of single layer cross section signal of electron beam, the energy level and energy density distribution are divided and calculated. The space energy isosurface is segmented to form a sequential energy surface by reconstructing the active zone volume model with different heights. The focal spot in the active region is the space with 90% peak energy. The software and hardware system in this paper can be used to evaluate the quality of electron beam effectively.
【作者单位】： 泰州学院船舶与机电工程学院;泰州南京理工大学研究院;
【基金】：国家自然科学基金资助项目(51375243) 江苏省自然科学基金资助项目(BK20140784) 江苏省高校自然科学基金资助项目(14KJB460028)
【分类号】：TG439.3
，
本文编号：2142786
[Abstract]:On the basis of analyzing the characteristics of electron beam high energy, the beam signal detection and measurement method is studied. A small angle electron beam magnetron deflection scanning acquisition scheme is proposed. A small hole sensor with a diameter of 25 渭 m is designed on a high temperature refractory tungsten plate. Set up signal detection device and control flow, share 60 MHz clock to ensure scanning and acquisition synchronization, convert electronic intensity through hole into voltage signal, transfer to memory at high speed after sampling and quantization of high frequency A / D, After visualized reconstruction of single layer cross section signal of electron beam, the energy level and energy density distribution are divided and calculated. The space energy isosurface is segmented to form a sequential energy surface by reconstructing the active zone volume model with different heights. The focal spot in the active region is the space with 90% peak energy. The software and hardware system in this paper can be used to evaluate the quality of electron beam effectively.
【作者单位】： 泰州学院船舶与机电工程学院;泰州南京理工大学研究院;
【基金】：国家自然科学基金资助项目(51375243) 江苏省自然科学基金资助项目(BK20140784) 江苏省高校自然科学基金资助项目(14KJB460028)
【分类号】：TG439.3
，
本文编号：2142786
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