CrN薄膜掺杂Mo元素改性研究

发布时间：2018-08-07 17:49

【摘要】：利用多弧离子镀技术,在4Cr13不锈钢表面制备CrN薄膜,并掺杂不同含量的Mo原子,制备CrMoN复合薄膜。用XRD、附着力划痕仪、显微硬度计和电化学测量仪分别检测复合薄膜的相结构、结合力、硬度以及在3.5%NaCl溶液、1 mol·L~(-1) NaOH溶液和1 mol·L~(-1) H_2SO_4溶液中的电化学腐蚀性能。结果表明;CrMoN复合薄膜形成了以NaCl型面心立方CrN结构为基础的(Cr,Mo)N结构;当Mo含量达到31.08%(原子分数)时,在(311)、(111)方向上出现Mo_2N的衍射峰,此时薄膜出现了CrN、(Cr,Mo)N和Mo_2N相结构并存的情况。当Mo的原子分数为7.09%时,结合力最大为57 N,显微硬度(HV)达到最大值29623 MPa;当Mo含量为14.26%时,在H_2SO_4溶液和NaOH溶液中耐蚀性能最好;当Mo含量为5.15%时,在NaCl溶液中耐蚀性能最好。复合薄膜腐蚀机理主要是局部腐蚀中的小孔腐蚀,缝隙腐蚀和电偶腐蚀也会发生。
[Abstract]:CrN thin films were prepared on the surface of 4Cr13 stainless steel by multi-arc ion plating, and CrMoN composite films were prepared by doping Mo atoms with different contents. The phase structure, adhesion, hardness and electrochemical corrosion properties of the composite films in 1 mol L ~ (-1) NaOH solution and 1 mol L ~ (-1) H_2SO_4 solution were measured by XRD, adhesion scratch tester, microhardness tester and electrochemical measurement instrument, respectively. The results show that the (CrMoN) N structure is formed on the basis of NaCl type face-centered cubic CrN structure, and when Mo content reaches 31.08% (atomic fraction), the diffraction peak of Mo_2N appears in the direction of (311), (111), and CrN, (CrMo) N and Mo_2N phase structure coexist. When the atomic fraction of Mo is 7.09, the maximum binding force is 57N, and the maximum value of microhardness (HV) is 29623 MPA. When Mo content is 14.26, the corrosion resistance is the best in H_2SO_4 solution and NaOH solution, and when Mo content is 5.15%, the corrosion resistance is the best in NaCl solution. The corrosion mechanism of composite film is mainly pore corrosion, gap corrosion and galvanic corrosion.
【作者单位】：桂林电子科技大学广西信息材料重点实验室;
【基金】：国家自然科学基金(51264007);国家自然科学基金青年基金(51201043) 广西科学研究与技术开发科技攻关计划项目(桂科攻12118020-2-2-1) 广西信息材料重点实验室项目(桂科能1210908-10-Z) 桂林电子科技大学-桂林电科院研究生联合培养基地专项经费资助项目(20121225-10-Z;20121225-03-Z)
【分类号】：TG174.4

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