TC4钛合金-B270玻璃热压连接工艺研究

发布时间：2018-08-17 14:25

【摘要】：B270光学玻璃具有良好的透光反射效果、表面硬度较高,广泛应用在光学镀膜领域。钛合金凭借其优异的比强度、耐蚀性和耐热性而被广泛应用于各个领域,因此,利用光学玻璃与TC4钛合金组成复合结构,改善玻璃本身延展性和冲击韧性低的缺陷,最终能够实现玻璃/金属连接件在微电子和光学等领域的广泛使用。目前在工业领域技术成熟且得到大规模运用的是玻璃/可伐合金、玻璃/铝连接件,科研领域对玻璃/TC4钛合金的研究较少,二者的连接技术有待开发。本课题主要研究了采用真空热压和阳极键合两种工艺实现TC4钛合金/玻璃的稳固连接和良好气密性。本课题研究分析了 TC4钛合金预表面处理对TC4钛合金/玻璃真空热压连接效果的影响。分析了不同厚度的氧化膜对热压过程中玻璃/TC4钛合金连接效果的影响,观察界面形貌,测定界面元素分布;对比分析了不同喷砂颗粒大小对TC4钛合金表面形貌的影响,喷砂与喷蚀在TC4钛合金表面粗化的优劣,确定了最合适的TC4钛合金表面预处理工艺。研究了真空热压参数(热压温度T、热压时间t、热压压力P)对TC4钛合金/玻璃连接界面结构、结合成效的影响,并探讨了影响连接强度的残余应力的成因和解决方法以及真空热压的连接机制。结果表明:通过TC4钛合金表面粗化处理增加了金属表面积,加强了氧化膜与金属基体、玻璃与TC4钛合金的结合强度,氧化处理不仅提升了玻璃的润湿性,更是在氧化膜与玻璃紧密接触的过程中,与玻璃发生化合反应,剪切强度可达11MPa,界面结合率达到95%以上。对应的真空热压参数为:T=750℃,t=2h,P=0.5MPa。本课题研究了 TC4钛合金/玻璃的阳极键合工艺,分析了不同键合工艺参数(键合温度T、键合电压V)下的工艺特征,并通过对键合界面的结构与元素分析界定,对比了真空热压与阳极键合工艺特点的差异,并最终探讨了 TC4钛合金/玻璃阳极键合机理,当键合温度T在350-550℃,电场电压V在500-700V时,能够实现TC4钛合金/玻璃的稳固连接,剪切强度达到15MPa以及100%结合率。键合界面结构分析发现:整个键合区域是由玻璃-中间过渡层-TC4钛合金的结构组成,界面两侧的化学元素呈梯度分布。TC4钛合金与玻璃的键合过程分为界面极化致使碱金属离子迁移、形成电势实现紧密接触阶段、金属离子与玻璃内氧离子互相迁移发生氧化反应,最终过渡层形成三个阶段。碱金属离子受电场和温度场作用发生迁移是界面结合的先决条件,内部静电力的产生以及化学浓度差为离子迁移发生氧化反应最终形成过渡层提供了动力。
[Abstract]:B270 optical glass is widely used in the field of optical coating due to its good transmittance and high surface hardness. Titanium alloys are widely used in various fields because of their excellent specific strength, corrosion resistance and heat resistance. Therefore, the composite structure of optical glass and TC4 titanium alloy is used to improve the defects of low ductility and impact toughness of glass. Finally, glass / metal connectors can be widely used in the fields of microelectronics and optics. At present, glass / Kovar alloy and glass / aluminum joint are the mature and widely used technology in the industrial field. The research on glass / TC4 titanium alloy is rare in the field of scientific research, and the connection technology between them needs to be developed. In this paper, vacuum hot pressing and anodic bonding are used to realize the stable connection and good airtightness of TC4 titanium alloy / glass. The effect of pre-surface treatment of TC4 titanium alloy on TC4 titanium alloy / glass vacuum hot pressing bonding was studied. The influence of different thickness of oxide film on the bonding effect of glass / TC4 titanium alloy during hot pressing was analyzed, the interface morphology was observed, the distribution of interface elements was measured, and the effect of different sand blasting particle size on the surface morphology of TC4 titanium alloy was compared. The surface coarsening of TC4 titanium alloy by sandblasting and pitting was studied. The most suitable surface pretreatment process of TC4 titanium alloy was determined. The effect of vacuum hot pressing parameters (hot pressing temperature T, hot pressing time t, hot pressing pressure P) on the interface structure and bonding effect of TC4 titanium alloy / glass was studied. The cause and solution of residual stress which affect the bonding strength and the connection mechanism of vacuum hot pressing are discussed. The results showed that the surface area of TC4 titanium alloy was increased by coarsening treatment, and the bonding strength of glass and TC4 titanium alloy was strengthened, and the wettability of glass was not only improved by oxidation treatment, but also by the surface coarsening treatment of TC4 titanium alloy. In the process of close contact between the oxide film and the glass, the composite reaction takes place with the glass, the shear strength is up to 11 MPA, and the interface bonding rate is over 95%. The corresponding vacuum hot pressing parameters are as follows: 1: TX 750 鈩，

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