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环境温度对磁控溅射Ti-Al-Si-N涂层摩擦学性能的影响

发布时间:2018-08-29 18:07
【摘要】:目的探索磁控溅射制备的Ti-Al-Si-N涂层在不同环境温度下的摩擦学性能。方法利用磁控溅射技术,在AISI304不锈钢表面制备了Ti-Al-Si-N涂层,采用扫描电镜、能谱仪和X射线衍射仪研究了涂层的成分与微观结构,利用HT-1000型高温摩擦磨损试验机,以直径为5 mm的Al_2O_3球作为摩擦副,研究了Ti-Al-Si-N涂层在室温、200、400、600℃时的摩擦学性能。结果磁控溅射制得的Ti-Al-Si-N涂层表面平整、致密,具有典型的柱状晶结构;在室温、200、400、600℃的环境温度下,涂层的摩擦系数分别为0.6、0.35、0.25和0.2,磨损体积分别为0.319、0.232、0.0149和0.0136 mm~3。涂层的摩擦系数和磨损体积均随温度的升高而降低。结论随着测试温度的升高,磨痕区域生成越多的以氧化钛和氧化铝为主的氧化物,其具有一定的减摩作用。在室温下,涂层的磨损机理主要为疲劳剥落,200℃时为磨粒磨损,400℃时为磨粒磨损和氧化磨损,600℃时主要为氧化磨损。
[Abstract]:Aim to investigate the tribological properties of Ti-Al-Si-N coatings prepared by magnetron sputtering at different ambient temperatures. Methods the Ti-Al-Si-N coating was prepared on the surface of AISI304 stainless steel by magnetron sputtering technique. The composition and microstructure of the coating were studied by SEM, EDS and XRD. The high temperature friction and wear tester HT-1000 was used to study the composition and microstructure of the coating. The tribological properties of Ti-Al-Si-N coating at room temperature (200400600 鈩,

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