二维振动抛光装置的研究

发布时间：2018-09-10 16:32

【摘要】：先进制造和高端装备产品的完成都需要表面抛光技术,在手机通讯、汽车制造、航天航海等高新技术领域中,微结构元件的表面质量在设备完成重大任务时扮演着重要角色,如何提高重要元器件的微纳结构表面质量成为急需解决的关键技术问题。现有的表面抛光技术,如超声椭圆振动抛光、气囊抛光技术和激光抛光技术等虽然技术比较成熟,但是普遍存在装置设计复杂等缺点。本文创新性的将椭圆振动应用于工件表面的抛光上,区别于超声椭圆振动,本文采用的是利用压电叠堆通过柔性铰链直接驱动抛光磨头,对正交放置的压电叠堆施加正弦信号,此信号具有一定的相位差,使其带动抛光磨头完成椭圆抛光运动。椭圆振动抛光一方面可以有效的提高工件表面的表面质量,另一方面也可以通过提高抛光频率有效的提高抛光效率。本文设计了两种椭圆振动抛光装置:二维椭圆振动抛光装置和三维椭圆振动抛光装置。设计了两种铰链结构并通过ANSYS软件进行了静力学分析、模态分析,避免了耦合现象和共振现象的发生。尝试性的加工了一种二维椭圆振动抛光装置,通过对铝合金和黄铜表面抛光实验,验证了椭圆振动抛光装置能有效地降低抛光工件的表面粗糙度。本文具体主要内容如下:首先,设计了椭圆振动抛光装置,该装置直接利用正交放置的压电叠堆驱动抛光磨头配合超精密机床进行抛光,使得抛光过程更加简洁,抛光工件的表面更加光滑。主要对椭圆振动抛光的理论进行了分析,主要包括椭圆运动的原理、柔性铰链的结构分析以及压电叠堆驱动方法的研究,设计了两种抛光装置,并尝试加工了二维椭圆振动抛光装置。其次,对二维椭圆振动抛光装置进行了性能测试,通过使用Newport RS4000气浮隔振台、Microsense II5300电容式位移传感器、压电叠堆、功率放大器、PMAC运动控制卡、Siemens工控机以及推拉力计等实验设备,对实验室噪声、装置的刚度、装置的固有频率进行了检测,通过检测验证了装置设计的可靠性。最后,通过二维椭圆振动抛光装置对铝、黄铜和紫铜三种工件进行了抛光实验,通过对工件表面质量的检测,验证了二维椭圆振动抛光可以降低工件表面的粗糙度,并且用两种不同材料(羊毛和橡胶)的抛光磨头对紫铜进行了抛光对比实验,相同抛光条件下羊毛磨头抛出的工件表面粗糙度更低,验证了抛光磨头的材料对工件表面的粗糙度也有一定的影响。
[Abstract]:Both advanced manufacturing and the completion of high-end equipment products require surface polishing technology. In high-tech fields such as mobile phone communications, automobile manufacturing, aerospace and navigation, the surface quality of microstructural components plays an important role in the completion of major tasks for the equipment. How to improve the surface quality of micro-nano structure of important components has become a key technical problem that needs to be solved urgently. The existing surface polishing techniques, such as ultrasonic elliptical vibration polishing, air bag polishing and laser polishing, are mature, but the device design is complex. In this paper, the elliptical vibration is innovatively applied to the polishing of workpiece surface, which is different from ultrasonic elliptic vibration. In this paper, the piezoelectric stack is used to drive the polishing grinding head directly through the flexure hinge, and the sinusoidal signal is applied to the orthonormal stacked piezoelectric stack. This signal has a certain phase difference, which drives the polishing head to finish the elliptical polishing motion. On the one hand, elliptical vibration polishing can effectively improve the surface quality of the workpiece, on the other hand, it can effectively improve the polishing efficiency by increasing the polishing frequency. In this paper, two kinds of elliptical vibration polishing devices are designed: two dimensional elliptical vibration polishing device and three dimensional elliptical vibration polishing device. Two kinds of hinge structures are designed and statically analyzed by ANSYS software, modal analysis is carried out to avoid coupling phenomenon and resonance phenomenon. A two-dimensional elliptical vibration polishing device was fabricated. The experiments on the surface polishing of aluminum alloy and brass proved that the elliptical vibration polishing device can effectively reduce the surface roughness of the polished workpiece. The main contents of this paper are as follows: firstly, the elliptical vibration polishing device is designed. The device directly uses the piezoelectric stack driven polishing head to polishing with ultra-precision machine tools, which makes the polishing process more concise. The surface of the polished workpiece is smoother. The theory of elliptical vibration polishing is analyzed, including the principle of elliptical motion, the structure analysis of flexure hinge and the research of piezoelectric stack driving method. Two polishing devices are designed. The two-dimensional elliptical vibration polishing device is also tried to be machined. Secondly, the performance of 2-D elliptical vibration polishing device is tested by using microsense II5300 capacitive displacement sensor, piezoelectric stack, power amplifier PMAC-motion control card, Siemens industrial control computer and push-pull dynamometer, etc., using Newport RS4000 air floatation vibration isolator, micro sense II5300 capacitive displacement sensor, piezoelectric stack, power amplifier, PMAC motion control card, and push-pull dynamometer, etc. The laboratory noise, the stiffness of the device and the natural frequency of the device are tested, and the reliability of the device design is verified. Finally, three kinds of workpieces, aluminum, brass and red copper, are polished by using a two-dimensional elliptical vibration polishing device. It is proved that the two-dimensional elliptical vibration polishing can reduce the surface roughness of the workpiece by testing the surface quality of the workpiece. A comparative polishing experiment was carried out with two polishing heads of different materials (wool and rubber). Under the same polishing conditions, the surface roughness of the workpiece thrown by the wool grinding head was lower than that of the other. It is verified that the material of polishing grinding head also has certain influence on the roughness of workpiece surface.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG580.2

【相似文献】