直流磁控溅射沉积N-Ti-TiN镀膜耐蚀性能
发布时间：2018-09-14 10:32
【摘要】：通过固定N层和Ti N层的沉积时间,改变Ti层沉积时间,在AZ31镁合金表面采用直流磁控溅射技术制备N-Ti-Ti N镀膜,研究镀钛时间对N-Ti-Ti N镀膜的形貌、腐蚀性能的影响。利用扫描电镜(SEM)、能谱仪等手段分析镀膜的表面形貌和成分,通过动电位极化试验,研究镀膜的耐蚀性。结果表明:改变不同镀钛时间获得的N-Ti-Ti N镀膜的厚度在1~1.4μm之间,镀膜分布均匀,随着镀钛膜沉积时间的增加镀膜的厚度增加,膜间结合性好;与镁合金基体相比,不同镀钛时间的N-Ti-Ti N镀膜均能提高材料的耐蚀性,镀钛时间为20 min的N-Ti-Ti N镀膜的耐蚀性更为优异。
[Abstract]:By changing the deposition time of Ti layer by fixed N layer and Ti N layer, N-Ti-Ti N coating was prepared on AZ31 magnesium alloy surface by DC magnetron sputtering. The influence of titanium plating time on the morphology and corrosion property of N-Ti-Ti N coating was studied. The surface morphology and composition of the coating were analyzed by means of scanning electron microscope (SEM) (SEM), spectrometer. The corrosion resistance of the coating was studied by potentiodynamic polarization test. The results show that the thickness of N-Ti-Ti N coating is between 11. 4 渭 m and 11. 4 渭 m, and the film distribution is uniform. With the increase of the deposition time of titanium film, the adhesion of N-Ti-Ti N film is better than that of magnesium alloy substrate. The corrosion resistance of N-Ti-Ti N coating with different titanium plating time was improved, and the corrosion resistance of N-Ti-Ti N coating with 20 min titanium plating time was better than that of N-Ti-Ti N coating.
【作者单位】： 佳木斯大学黑龙江省高校生物医学材料重点实验室;
【基金】：国家自然科学基金项目(31370979) 黑龙江省高校生物医学材料重点实验室2012年度开放课题(YX12002) 佳木斯大学科学技术面上项目(L2013-073);佳木斯大学大学生科技创新项目(XSlz2016-06)
【分类号】：TG174.4
，
本文编号：2242450
[Abstract]:By changing the deposition time of Ti layer by fixed N layer and Ti N layer, N-Ti-Ti N coating was prepared on AZ31 magnesium alloy surface by DC magnetron sputtering. The influence of titanium plating time on the morphology and corrosion property of N-Ti-Ti N coating was studied. The surface morphology and composition of the coating were analyzed by means of scanning electron microscope (SEM) (SEM), spectrometer. The corrosion resistance of the coating was studied by potentiodynamic polarization test. The results show that the thickness of N-Ti-Ti N coating is between 11. 4 渭 m and 11. 4 渭 m, and the film distribution is uniform. With the increase of the deposition time of titanium film, the adhesion of N-Ti-Ti N film is better than that of magnesium alloy substrate. The corrosion resistance of N-Ti-Ti N coating with different titanium plating time was improved, and the corrosion resistance of N-Ti-Ti N coating with 20 min titanium plating time was better than that of N-Ti-Ti N coating.
【作者单位】： 佳木斯大学黑龙江省高校生物医学材料重点实验室;
【基金】：国家自然科学基金项目(31370979) 黑龙江省高校生物医学材料重点实验室2012年度开放课题(YX12002) 佳木斯大学科学技术面上项目(L2013-073);佳木斯大学大学生科技创新项目(XSlz2016-06)
【分类号】：TG174.4
，
本文编号：2242450
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