毛细管辅助微细电沉积制备金属结构试验研究

发布时间：2018-10-24 17:59

【摘要】：微细加工在许多工业领域中有着重要而广阔的应用前景。金属电沉积是指利用电化学原理,在外接电场作用下,阳极与阴极通过电沉积液连成回路,沉积液中的金属离子沉积到阴极表面上的过程。当金属达到纳米尺度时,会出现一些新的效应,如量子尺寸效应、小尺寸效应和宏观量子隧道效应等。这些效应往往同时起作用,并由此导致纳米材料的力、热、光、电,磁,以及化学性能与其对应的块体材料不同。基于已有的微细加工技术基础,本文提出利用毛细管辅助微细电沉积制备金属结构的新方法,该方法以独特设计的微电极作为电沉积反应中的阳极,结合局部电沉积微加工技术,能够快速、简单地实现金属微结构制备。本课题主要从理论分析、实验装置系统设计、数值模拟仿真及工艺试验分析这几个方面对这种金属微结构制备方法进行研究,主要研究内容及创新点如下:(1)提出一种毛细管辅助微细电沉积制备金属结构的加工方法。该方法是利用毛细玻璃管作为绝缘装置,微细铂丝插入毛细管内部并与其底部管口齐平作为电化学反应中的阳极。阳极固定在Z向高精度电控平移台上,在自动控制系统的控制下能实现微细金属结构的快速且高效制备。(2)利用COMSOL Multiphysics仿真软件对微细电沉积制备金属铜柱结构的过程进行电场数值模拟。分别针对未套有绝缘装置和套有绝缘装置(毛细管)的两种物理模型进行仿真研究,从理论上验证毛细管辅助微细电沉积制备金属结构的可行性。(3)设计并搭建以毛细管辅助微细电沉积进行微细加工的试验系统平台。完成核心电沉积加工单元的设计、步进系统的自动控制以及利用CCD监控系统对沉积过程进行实时监测,及时完成各项工艺参数的调整。(4)为探究微细金属结构生长的最佳工艺参数,以制备微细金属铜柱为例,分别从脉冲电源的工作电压和占空比两种工艺参数进行加工试验,得出制备铜柱的最佳工艺参数。在此研究基础上,根据制备微细铜柱的最佳电参数来进一步指导其他微细金属结构的制备过程,并由此获得不同的微细金属结构。
[Abstract]:Micro-machining has an important and broad application prospect in many industrial fields. Metal electrodeposition refers to the process of metal ion deposition on the surface of cathode under the action of electrochemistry and external electric field, and the anode and cathode are connected through the electrodeposition liquid to form a loop, and the metal ions in the deposition solution are deposited on the surface of the cathode. When metal reaches nanometer scale, some new effects will appear, such as quantum size effect, small size effect and macroscopic quantum tunneling effect. These effects often work at the same time, which leads to the force, heat, light, electricity, magnetic, and chemical properties of nanomaterials being different from their corresponding bulk materials. Based on the existing micromachining technology, a new method for the preparation of metal structures by capillary assisted micro-electrodeposition is proposed, in which the uniquely designed microelectrode is used as the anode in electrodeposition reaction. Combined with local electrodeposition micromachining technology, metal microstructures can be fabricated quickly and simply. In this paper, the preparation methods of the metal microstructures are studied from the aspects of theoretical analysis, experimental device system design, numerical simulation and process test analysis. The main research contents and innovations are as follows: (1) A capillary assisted micro-electrodeposition method is proposed to prepare metal structures. In this method, the capillary glass tube is used as the insulating device, the thin platinum wire is inserted into the capillary tube and is used as the anode in the electrochemical reaction. The anode is fixed on the Z direction high precision electronic control translation platform, Under the control of automatic control system, micro metal structure can be fabricated quickly and efficiently. (2) the electric field numerical simulation of micro electrodeposition process of metal copper column structure is carried out by using COMSOL Multiphysics software. Two kinds of physical models of uninsulated devices and capillaries (capillary tubes) were simulated and studied respectively. The feasibility of preparing metal structure by capillary assisted micro electrodeposition was verified theoretically. (3) A test system platform for micro electrodeposition with capillary assisted micro electrodeposition was designed and built. Complete the design of the core electrodeposition processing unit, the automatic control of the step system and the real-time monitoring of the deposition process by using the CCD monitoring system. (4) in order to explore the best technological parameters for the growth of micro-metal structure, taking the preparation of micro-metal copper column as an example, the processing tests were carried out from the working voltage and duty cycle of the pulse power supply. The optimum technological parameters for the preparation of copper column were obtained. On the basis of this study, the preparation process of other micro-metal structures is further guided by the optimum electrical parameters of the preparation of copper microcolumns, and different micro-metal structures are obtained.
【学位授予单位】：南京航空航天大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG662

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