双抛光轮磁流变机床设计与抛光工艺研究

发布时间：2018-11-01 10:40

【摘要】：针对传统单抛光轮机床在加工中存在的不足,研发一台拥有双抛光轮的磁流变机床,该机床采用气浮技术,有力的减小了外界振动对加工过程的影响。该机床具备加工大口径平面、球面、离轴非球面以及加工光学元件表面小特征的能力,并对加工性能进行了实验验证。以所研发机床为平台分别研究了材料去除过程稳定性,修形能力和加工光学表面小特征的能力实验。实验表明在七个小时内去除函数的体积其去除效率低于5%,并对一块直径100.7mm的光学元件加以修形,经过迭代加工,PV值在2小时内由波长0.773下降到波长0.173,RMS值由61.3nm下降到4.577nm。并用直径20mm的抛光轮进行小特征的加工,加工结果表明小特征的宽度约为2.5mm,且图案清晰、均匀。由此表明,所研发机床具有较好的材料去除稳定性,较强的面形修正能力和加工光学元件小特征的能力。
[Abstract]:In view of the shortcomings of traditional single polishing wheel machine tool, a magneto-rheological machine tool with double polishing wheel is developed. This machine adopts air floatation technology, which can reduce the influence of external vibration on the machining process. The machine has the ability to process large aperture plane, spherical surface, off-axis aspherical surface and small surface features of optical elements. On the platform of the developed machine tool, the stability of the material removal process, the ability to modify the shape and the ability to process the small characteristics of the optical surface were studied. The experimental results show that the removal efficiency of the removal function is less than 5 in seven hours, and the shape of an optical element with diameter 100.7mm is modified. After iterative processing, the PV value decreases from 0.773 to 0.173 in 2 hours. The RMS value decreased from 61.3nm to 4.577nm. The machining results show that the width of the small feature is about 2.5 mm, and the pattern is clear and uniform. It is shown that the developed machine tool has better material removal stability, better surface modification ability and the ability to process the small characteristics of optical elements.
【作者单位】：山东科技大学机械电子工程学院;国防科学技术大学机电工程与自动化学院;
【基金】：山东省自然科学基金(ZR2014EEM021)
【分类号】：TG580.692

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