深冷处理对GLC多层薄膜界面结构及结合强度的影响
发布时间：2018-11-13 11:34
【摘要】：为了研究深冷处理后GLC多层薄膜界面结构及结合强度的变化,采用非平衡直流磁控溅射技术,在W9高速钢上沉积了含GLC功能层、Cr/C梯度层及Cr底层的类石墨碳多层薄膜,厚度约为4μm。采用液氮(-197℃)对GLC/高速钢复合体系进行深冷处理,借助XPS、SEM及TEM表征了GLC薄膜的表面、断面结构及界面微观组织;采用洛氏硬度仪定性考察了薄膜的膜基结合强度。结果表明:复合体系经深冷处理后除基体的硬度及承载能力得以提高外,多层膜各层及基体中裂纹的萌生及传播受到抑制,界面结合强度明显增强。其作用机理在于深冷处理后,Cr底层的柱状晶结构被"打破",纤维状结构消除,组织更加致密均匀;同时,Cr/C梯度层中Cr晶粒碎化平均尺寸由20 nm减小为5 nm,达到细晶强化效果。因此,膜基及层间界面结构得以改善,界面失配减小,基体及多层膜各层间的变形协调性能增强。
[Abstract]:In order to study the interface structure and bonding strength of GLC multilayer films after cryogenic treatment, graphite-like carbon like multilayer films containing GLC functional layer, Cr/C gradient layer and Cr substrate were deposited on W9 high speed steel by unbalanced DC magnetron sputtering technique. The thickness is about 4 渭 m. Liquid nitrogen (-197 鈩，
本文编号：2328984
[Abstract]:In order to study the interface structure and bonding strength of GLC multilayer films after cryogenic treatment, graphite-like carbon like multilayer films containing GLC functional layer, Cr/C gradient layer and Cr substrate were deposited on W9 high speed steel by unbalanced DC magnetron sputtering technique. The thickness is about 4 渭 m. Liquid nitrogen (-197 鈩，
本文编号：2328984
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