钛合金表面Ti-TiN-Zr-ZrN多层膜制备及性能
发布时间：2018-11-26 12:16
【摘要】：采用多靶位真空阴极电弧沉积技术,在TC11钛合金表面制备24周期的Ti-TiN-Zr-ZrN软硬交替多元多层膜。用扫描电镜、X射线衍射仪、显微硬度计、结合力划痕仪、球-盘摩擦磨损试验仪、砂粒冲刷试验仪和3D表面形貌仪,研究多层膜的表面及截面形貌、相结构、厚度、硬度、膜/基结合力、摩擦磨损性能和抗砂粒冲蚀性能。结果表明:所制备TiTiN-Zr-ZrN多层膜厚度约为5.8μm,维氏显微硬度为28.10GPa,膜基结合力为56N;TC11钛合金表面镀多层膜后耐磨性提高了一个数量级,体积磨损率由7.06×10~(-13) m~3·N~(-1)·m~(-1)降低到3.03×10~(-14) m~3·N~(-1)·m~(-1);多层膜软硬层交替的结构,受砂粒冲蚀时裂纹扩展至金属软层时应力的缓冲而出现偏转,对TC11钛合金有良好的抗砂粒冲蚀保护作用。
[Abstract]:Ti-TiN-Zr-ZrN soft and hard alternate multilayer films were prepared on the surface of TC11 titanium alloy by multi-target vacuum cathode arc deposition. The surface and cross section morphology, phase structure, thickness, hardness of multilayer films were studied by means of scanning electron microscope, X-ray diffractometer, microhardness tester, ball disk friction and wear tester, sand erosion tester and 3D surface topography instrument. Film / substrate adhesion, friction and wear resistance and erosion resistance of sand particles. The results show that the thickness of the TiTiN-Zr-ZrN multilayer is about 5.8 渭 m, the Vickers microhardness is 28.10 GPA, and the base adhesion is 56 N. The wear resistance of TC11 titanium alloy was improved by one order of magnitude, and the volume wear rate decreased from 7.06 脳 10 ~ (-13) m ~ (-1) to 3.03 脳 10 ~ (-14) m ~ (-1). The alternative structure of multilayer soft and hard layer deflects when the crack expands to the soft layer of metal during the erosion of sand particles, which has a good anti-erosion effect on TC11 titanium alloy.
【作者单位】： 华南理工大学材料科学与工程学院;广东省新材料研究所现代材料表面工程技术国家工程实验室;广东省新材料研究所广东省现代表面工程技术重点实验室;中国航发湖南动力机械研究所;
【基金】：广东省省级科技计划项目资助(2014B070706026,2013B061800053)
【分类号】：TG174.4
本文编号：2358535
[Abstract]:Ti-TiN-Zr-ZrN soft and hard alternate multilayer films were prepared on the surface of TC11 titanium alloy by multi-target vacuum cathode arc deposition. The surface and cross section morphology, phase structure, thickness, hardness of multilayer films were studied by means of scanning electron microscope, X-ray diffractometer, microhardness tester, ball disk friction and wear tester, sand erosion tester and 3D surface topography instrument. Film / substrate adhesion, friction and wear resistance and erosion resistance of sand particles. The results show that the thickness of the TiTiN-Zr-ZrN multilayer is about 5.8 渭 m, the Vickers microhardness is 28.10 GPA, and the base adhesion is 56 N. The wear resistance of TC11 titanium alloy was improved by one order of magnitude, and the volume wear rate decreased from 7.06 脳 10 ~ (-13) m ~ (-1) to 3.03 脳 10 ~ (-14) m ~ (-1). The alternative structure of multilayer soft and hard layer deflects when the crack expands to the soft layer of metal during the erosion of sand particles, which has a good anti-erosion effect on TC11 titanium alloy.
【作者单位】： 华南理工大学材料科学与工程学院;广东省新材料研究所现代材料表面工程技术国家工程实验室;广东省新材料研究所广东省现代表面工程技术重点实验室;中国航发湖南动力机械研究所;
【基金】：广东省省级科技计划项目资助(2014B070706026,2013B061800053)
【分类号】：TG174.4
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