绝对位置测量传感器光机系统设计

发布时间：2018-12-11 08:00

【摘要】：绝对位置测量传感器是数控机床系统的闭环反馈控制元件,是高档数控机床最关键的部件,在高精度测量领域有着不可替代的作用。绝对式光栅位置传感器具有精度高、分辨率高、响应速度快、测量范围大和可实现动态测量等优点,是我国工业现代化重点发展技术。绝对位置测量装置属于光电测量范畴,对光学系统要求较高,测量常用条纹读取方式,将光束通过透镜调制成平行光,再将条纹投影在光电探测器表面,光的平行度直接影响成像质量,对光的平行度要求较高,通常需要设计复杂的透镜曲面。本课题基于新型伪随机码单码道绝对式光栅尺的编码原理,实现直线位置与信息编码唯一对应;为提高抗污染能力与测量精度,依据编码尺要求设计光源照明系统,确定线阵CCD接收元件的型号,使用ZEMAX软件设计满足课题要求的成像光学系统,设计封装外壳机械结构;设计信号采集系统硬件电路,并搭建测试系统。主要研究内容包括:(1)分析绝对式编码常用方式优缺点,总结绝对式光栅传感器发展现状。(2)选定线阵CCD型号,确定光源型号参数,使用TracePro软件设计聚焦透镜结构。(3)进行光路结构参数计算,使用ZEMAX软件设计光学成像放大透镜,仿真优化使其达到设计要求。(4)为实现传感器集成化与小型化,设计封装外壳机械结构。(5)对输出信号设计信号采集系统硬件电路,搭建测试系统,基本实现稳定准确读取光栅编码信息。
[Abstract]:Absolute position measurement sensor is the closed-loop feedback control element of CNC machine tool system and the most important component of high-grade NC machine tool. It plays an irreplaceable role in the field of high-precision measurement. The absolute grating position sensor has the advantages of high precision, high resolution, fast response speed, large measurement range and the ability to realize dynamic measurement. It is the key technology of industrial modernization in China. The absolute position measuring device belongs to the category of photoelectric measurement, and it requires higher optical system. The measuring method is usually used to read the fringes. The beam is modulated into parallel light through the lens, and then the fringe is projected on the surface of the photodetector. The parallelism of light directly affects the imaging quality and requires a high degree of parallelism, which usually requires the design of complex lens surfaces. Based on the coding principle of the new pseudorandom code single channel absolute grating ruler, the linear position and the information coding are uniquely corresponding. In order to improve the anti-pollution ability and measurement precision, the illumination system of light source is designed according to the requirements of encoding ruler, the model of linear CCD receiving element is determined, the imaging optical system that meets the requirements of the subject is designed by using ZEMAX software, and the mechanical structure of packaging shell is designed. The hardware circuit of signal acquisition system is designed, and the test system is built. The main research contents are as follows: (1) analyzing the advantages and disadvantages of the common methods of absolute coding, summarizing the development of absolute grating sensors. (2) selecting the linear CCD model and determining the parameters of the light source. The structure of focusing lens is designed with TracePro software. (3) the parameters of optical path structure are calculated, and the optical imaging magnifying lens is designed by ZEMAX software. (4) in order to realize the integration and miniaturization of sensor, the design requirements are optimized by simulation. The mechanical structure of package shell is designed. (5) the hardware circuit of the signal acquisition system is designed and the testing system is set up to realize the stable and accurate reading of the grating coding information.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TH741;TG659

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