不同Ti含量类石墨碳膜干摩擦磨损性能研究

发布时间：2018-12-12 21:30

【摘要】：目的提高高速钢的干摩擦学性能,探究不同Ti含量掺杂对类石墨碳膜摩擦性能的影响。方法用非平衡磁控溅射离子镀技术制备了不同Ti含量的类石墨碳膜,用光学显微镜、扫描电子显微镜、Raman光谱、洛氏硬度计、纳米压痕仪等分析薄膜的微观结构和力学性能,用高速线性往复磨损试验机检测薄膜的干摩擦学性能,并用光学显微镜观察磨痕。结果制备的碳膜表面颗粒尺寸较小,断面致密,且逐渐趋向柱状结构。随着Ti靶溅射电流的增大,逐渐增加的Ti元素打断了sp~3键生长,薄膜中生成更稳定的sp~2键,且sp~2键含量先增大后减小,在0.8 A达到最大,溅射电流为1.1 A时,Ti元素含量最大,sp~2键和sp~3键都减少。碳膜与基体结合力随着Ti靶电流变大而先增大后减小,在0.8 A结合最佳,约为HF3级。硬度和弹性模量先减小后增加,0.8 A时达到最小。碳膜摩擦系数相比于原样都较低,在0.09~0.12之间。磨损率先增大后减小,维持在(5~15)×10~(-16) m~3/(N·m)左右。结论不同Ti含量的类石墨碳膜,能明显降低高速钢与钢球对磨的粘着磨损倾向,降低摩擦系数和磨损率。
[Abstract]:Aim to improve the dry tribological properties of high speed steel (HSS) and to investigate the effect of doping with different Ti content on the tribological properties of graphite-like carbon films. Methods Graphite-like carbon films with different Ti content were prepared by unbalanced magnetron sputtering ion plating technique. The microstructure and mechanical properties of the films were analyzed by optical microscope, scanning electron microscope, Raman spectrum, Rockwell hardness meter and nano-indentation instrument. The dry tribological properties of the films were tested by a high speed linear reciprocating wear tester and the wear marks were observed by optical microscope. Results the surface particle size of the prepared carbon film is smaller, the section is compact, and the carbon film tends to columnar structure. With the increase of sputtering current of Ti target, the growth of sp~3 bond is interrupted by increasing Ti element, and a more stable sp~2 bond is formed in the film. The content of sp~2 bond increases first and then decreases, and reaches the maximum at 0.8 A and the sputtering current is 1.1 A. The content of Ti element was the largest, and the sp~2 and sp~3 keys were decreased. The bonding force between carbon film and substrate increases first and then decreases with the increase of target current of Ti, and the best binding force is at 0.8 A. it is about HF3 grade. The hardness and elastic modulus decreased first and then increased, and reached the minimum at 0.8 A. The friction coefficient of carbon film is lower than that of the original film, ranging from 0.09 to 0.12. The wear increased first and then decreased, and maintained at (5 ~ 15) 脳 10 ~ (-16) MN / (N m). Conclusion the graphite like carbon film with different Ti content can obviously reduce the adhesion wear tendency of high speed steel and steel ball, and reduce the friction coefficient and wear rate.
【作者单位】：太原理工大学;宁波工程学院;宁波正元铜合金有限公司;
【分类号】：TG174.4

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