PVD涂层技术制备类金刚石薄膜及性能研究综述

发布时间：2019-03-17 20:25

【摘要】：介绍了采用物理气相沉积(PVD)技术制备类金刚石涂层的方法,进而论述了涂层的摩擦磨损和结合力等性能的研究现状和发展前景。分析并综述了类金刚石涂层的技术发展,以及制备类金刚石薄膜的方法和影响其性能的多种要素。表面涂有类金刚石薄膜的工件具有较高的硬度、良好的热传导率、极低的摩擦系数、优异的电绝缘性能等。类金刚石薄膜(DLC Films)是近年来兴起的一种以sp3和sp2键的形式结合生成的亚稳态材料,因其优异的减摩和抗磨性能,在摩擦学领域获得了广泛应用,是一种与金刚石涂层性能相似的新型薄膜材料。DLC涂层的性能研究大多集中在它的摩擦学特性和结合力性能,并且作为优质的涂层材料已被广泛应用于汽车、模具、刀具等领域。
[Abstract]:The preparation of diamond-like carbon (DLC) coatings by physical vapor deposition (PVD) was introduced. The research status and development prospects of friction wear and adhesion of the coatings were also discussed. The technical development of diamond-like carbon coatings, the methods for preparing diamond-like carbon films and the factors affecting the properties of diamond-like carbon films are analyzed and summarized. The workpiece coated with diamond-like carbon film has high hardness, good thermal conductivity, extremely low friction coefficient, excellent electrical insulation and so on. Diamond-like carbon (DLC Films) film is a kind of metastable material formed by the combination of sp3 and sp2 bond in recent years. It has been widely used in the field of tribology because of its excellent anti-friction and anti-wear properties. DLC coating is a new kind of thin film material with similar properties as diamond coating. The properties of DLC coating are mostly focused on its tribological properties and adhesion properties, and have been widely used in automobile, die and mould as high-quality coating materials. Cutting tools and other fields.
【作者单位】：上海应用技术学院;
【基金】：上海市联盟计划资助项目(LM2014235,LM201374,LM201308) 上海市教育委员会科研创新项目(12YZ160) 上海应用技术学院研究生课程建设基金项目(101YM130007) 上海市大学青年教师培训项目(ZZyyy12003)~~
【分类号】：TG174.4

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