钝化时间对Fe30Mn9Al合金钝化膜半导体特性影响
发布时间：2019-04-28 14:37
【摘要】：运用电化学阳极钝化技术对Fe30Mn9Al合金在1 mol/L Na_2SO_4溶液中进行不同时间的表面钝化处理;利用俄歇电子能谱(AES)、X射线光电子能谱(XPS)表面分析技术及Mott-Schottky曲线测试技术研究钝化时间对Fe30Mn9Al合金钝化膜的组成结构与半导体特性的影响。结果表明:Fe30Mn9Al合金在1 mol/L Na_2SO_4溶液中钝化15 min所得钝化膜分为内外2层,外层具有n型半导体特征,由Fe_2O_3、Al_2O_3、Mn_2O_3、FeOOH和AlOOH组成,内层具有p型半导体特征,由MnO组成。随着钝化时间由15 min增至5 h,钝化膜中的MnO溶解,Mn含量降低,Fe、Al填充Mn留下的空位在膜内富集,Fe、Al氧化物转变为Fe、Al氢氧化物,钝化膜由FeOOH、AlOOH和Mn_2O_3组成,具有n型半导体特征。与钝化15 min所得钝化膜相比,钝化5 h所得钝化膜的施主浓度ND由2.58′10~(21) cm~(-3)降至1.96′10~(21) cm~(-3),平带电位Efb由 283 mV降至 366 mV,钝化膜的保护性能提高。
[Abstract]:The surface passivation of Fe30Mn9Al alloy in 1 mol/ L Na _ 2SO _ 4 solution was carried out by electrochemical anodic passivation technique, and Auger electron spectroscopy (AES) was used. The effect of passivation time on the composition and semiconductor properties of the passivation film of Fe30Mn9Al alloy was studied by X-ray photoelectron spectroscopy (XPS) surface analysis technique and the Mott-Schottky curve test technique. The results show that the passivation film of Fe30Mn9Al alloy in 1 mol/ L Na _ 2SO _ 4 solution for 15 min is divided into inner and outer layers, and the outer layer has n-type semiconductor features, and consists of Fe _ 2O _ 3, Al _ 2O _ 3, Mn _ 2O _ 3, FeOOH and AlOOH, and the inner layer has p-type semiconductor features and is composed of MnO. As the passivation time is increased from 15 min to 5 h, the MnO in the passivation film is dissolved, the Mn content is reduced, and the vacancies left by the Fe and Al filled Mn are enriched in the film, and the Fe and Al oxide are converted into Fe and Al hydroxide, and the passivation film is composed of FeOOH, AlOOH and Mn _ 2O _ 3, and has an n-type semiconductor feature. 涓庨挐鍖，
本文编号：2467712
[Abstract]:The surface passivation of Fe30Mn9Al alloy in 1 mol/ L Na _ 2SO _ 4 solution was carried out by electrochemical anodic passivation technique, and Auger electron spectroscopy (AES) was used. The effect of passivation time on the composition and semiconductor properties of the passivation film of Fe30Mn9Al alloy was studied by X-ray photoelectron spectroscopy (XPS) surface analysis technique and the Mott-Schottky curve test technique. The results show that the passivation film of Fe30Mn9Al alloy in 1 mol/ L Na _ 2SO _ 4 solution for 15 min is divided into inner and outer layers, and the outer layer has n-type semiconductor features, and consists of Fe _ 2O _ 3, Al _ 2O _ 3, Mn _ 2O _ 3, FeOOH and AlOOH, and the inner layer has p-type semiconductor features and is composed of MnO. As the passivation time is increased from 15 min to 5 h, the MnO in the passivation film is dissolved, the Mn content is reduced, and the vacancies left by the Fe and Al filled Mn are enriched in the film, and the Fe and Al oxide are converted into Fe and Al hydroxide, and the passivation film is composed of FeOOH, AlOOH and Mn _ 2O _ 3, and has an n-type semiconductor feature. 涓庨挐鍖，
本文编号：2467712
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