激光掩膜微细电解加工技术研究

发布时间：2019-05-27 11:49

【摘要】：随着MEMS(微机电系统)的迅猛发展,对微小金属器件需求越来越多,尤其尺寸在100μm~1mm之间的微小型金属零件,如何实现微小零件的快速加工是国内外学者研究较多的技术难题之一。本文将激光掩膜与微细电解加工技术相结合,提出光纤激光掩膜微细电解复合加工工艺。首先利用光纤脉冲激光器的高能量密度激光束对不锈钢304工件表面进行激光制掩膜,所生成的掩膜具有耐腐蚀保护特性,随后再利用微细电解加工实现对带激光掩膜图案的304不锈钢工件表面进行定域蚀除,实现微小型腔加工。该工艺能够避免超窄脉冲微细电解加工中微细电极制作,无需利用光刻技术制掩膜就能解决电解加工定域性问题。研究了激光掩膜微细电解复合加工的机理。对激光掩膜不锈钢工件表面特性进行X射线光电子能谱、X射线衍射和极化曲线分析,研究激光掩膜层耐腐蚀性机理。通过激光制掩膜,在304不锈钢表面生成Cr、Fe等氧化物薄膜,该氧化物薄膜具有耐腐蚀性特性,在随后的微细电解中起到掩膜保护作用,实现微细电解定域加工。研发了一套激光掩膜微细电解加工装置。通过工艺对比试验,研究不同激光功率、加工电压、占空比及电解液浓度等电加工参数对加工效果的影响。优化加工条件和电加工参数,进行多次激光掩膜微细电解加工,加工深度约30μm的型腔零件,实现了微小零件高效、低成本加工。
[Abstract]:With the rapid development of MEMS (micro-electro-mechanical system), there are more and more demand for micro-metal devices, especially small-sized metal parts with a size between 100 & mu; m ~ 1 mm, and how to realize the rapid processing of micro-parts is one of the many technical problems at home and abroad. In this paper, the laser mask and the micro-electrolysis processing technology are combined, and the micro-electrolysis composite processing technology of the optical fiber laser mask is put forward. first, using a high-energy density laser beam of an optical fiber pulse laser to make a laser mask on the surface of the stainless steel 304 workpiece, the generated mask has a corrosion-resistant protection characteristic, and then the surface of the 304 stainless steel workpiece with the laser mask pattern is localized and removed by the micro-electrolysis processing, And the micro-cavity processing is realized. The process can avoid the fabrication of the micro-electrode in the ultra-narrow pulse micro-electrolysis process, and can solve the problem that the electrolytic processing is fixed without using a photoetching technology to make a mask. The mechanism of micro-electrolysis of laser mask is studied. The corrosion resistance of the laser mask layer was studied by X-ray photoelectron spectroscopy, X-ray diffraction and polarization curve analysis on the surface characteristics of the laser-mask stainless steel workpiece. The oxide film of Cr, Fe and the like is formed on the surface of 304 stainless steel by a laser mask, and the oxide film has the characteristics of corrosion resistance, and a mask protection function is used in the subsequent micro-electrolysis to realize the micro-electrolysis localization processing. A set of laser-mask micro-electrolysis processing device was developed. The effects of different laser power, processing voltage, duty cycle and electrolyte concentration on the processing effect were studied by the process contrast test. The processing conditions and the electric processing parameters are optimized, a plurality of laser-mask micro-electrolysis processing is carried out, and a cavity part with a depth of about 30 mu m is processed, so that the micro-part is high-efficiency and low-cost processing is realized.
【学位授予单位】：佳木斯大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG662

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