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热处理过程对状态方程靶用纯铁薄膜微结构的影响

发布时间:2019-06-01 10:22
【摘要】:铁薄膜是目前激光状态方程实验研究中重要的目标材料,掌握其微观结构对于建立精密化制靶工艺及明确样品初始物理状态均具有基础性意义。将冷轧态纯铁薄膜进行不同温度下的真空热处理,采用X射线衍射仪、扫描电镜及金相显微镜等仪器对样品的微晶尺寸及微畸变、晶粒大小及取向、宏观残余应力等微观结构参数进行表征,研究了其微观结构的变化规律。结果显示,550℃以内样品结构变化以回复为主,表现为微晶长大、残余应力持续减小而晶粒形态及取向不变;550℃以上发生再结晶及晶粒长大,形成微米尺度的等轴晶,且结晶取向明显变化;各样品均未发生晶粒异常长大现象。
[Abstract]:Iron thin film is an important target material in the experimental study of laser equation of state at present. Mastering its microstructure is of fundamental significance for the establishment of precision target making process and the determination of the initial physical state of the sample. The cold rolled pure iron thin films were heat treated in vacuum at different temperatures. The microcrystal size, microdistortion, grain size and orientation of the samples were measured by X-ray diffractometer, scanning electron microscope and metallographic microscope. The microstructure parameters such as macroscopic residual stress were characterized, and the variation of microstructure was studied. The results show that the structural changes of the samples within 550 鈩,

本文编号:2490197

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