压电共振型隔膜泵的设计理论与试验研究

发布时间：2018-01-23 01:07

本文关键词： 压电振子共振隔膜泵磁力弹簧　出处：《吉林大学》2013年博士论文　论文类型：学位论文

【摘要】：隔膜泵是流体泵的一个重要种类，主要满足小型化、低输出性能方面的需求，近年在医药生物、精细化工、航空航天、微机电系统等领域的应用越来越广泛，显示着良好的发展前景。目前隔膜泵主要有利用电机凸轮机构驱动的隔膜泵(简称“电磁隔膜泵”)与压电振子驱动的薄膜泵(简称“压电泵”)两大类，其中压电泵对液体类介质的输出效果好，对气体的输出效果很差，同时存在输出压力低、压电晶片易发热、碎裂等问题，还没有广泛的市场应用；电磁隔膜泵则存在结构复杂、成本高、噪音大等问题，应用受到一定限制。本文将压电泵的结构简单的特点与系统谐振技术相结合，提出一种利用压电振动激励隔膜共振而形成驱动能力的新型压电共振型隔膜泵(简称“压电共振泵”)，研究这种压电共振泵的基本原理与构成方法，进行相关的样机设计与试验，是国家自然科学基金项目《压电型气体隔膜泵设计理论与关键技术研究》（项目编号：51175213）研究工作的一部分。总体内容如下： 1.对压电共振泵中所用圆形压电振子平衡条件与弯曲变形挠度进行了分析计算。通过压电振子有限元模型的建立，获取了其多阶模态的振型；使用解析的方法求解了周边固定支撑条件下压电振子中心点的挠度公式，通过实验测试的方法，得到了驱动电压对圆形压电振子中心点的挠度的影响示意图。最后对压电振子进行阻抗分析，测得了压电振子的阻抗特性及其固有频率。 2.将压电共振泵的主要结构划分为激振单元和泵送单元两部分，分别描述了两个单元的作用与工作原理；对激振单元，建立了动力学模型并解析了各构成部件的刚度，获得了共振系统的放大倍数；对泵送单元，推导了隔膜膜片的挠度和及其对流体的近似输出流量计算公式；最后对激振单元的共振频率和振动位移进行了试验测量。 3.针对压电共振泵中圆形共振板弹簧不易换取的缺点，利用磁力弹簧刚度可变的特性，设计了磁力弹簧式压电共振型隔膜泵(简称“磁力式压电共振泵”)。首先对磁力弹簧的特性进行了研究，建立了磁力弹簧的数学模型，通过计算得到了磁力弹簧轴向刚度与轴向间距的关系式，并使用电子称与精雕机台面搭成的试验台，对磁力弹簧轴向力进行了测量；其次，描述了磁力式压电共振泵的工作原理，并建立了其动力学模型，从计算可知，，调整磁力弹簧的轴向间距即可改变共振泵的共振频率；通过对磁力式压电共振泵有限元建模分析，得知当激振单元处于一阶模态工作时，质量块的中心振幅最大；最后，对磁力式压电共振泵进行结构设计并制作了样机，对其激振单元进行了共振频率和振动位移的测量，最后对振动幅值比进行了测量。 4.针对压电共振泵和磁力式压电共振泵进行了两部分工作，第一部分，试验、测试对不同粘度液体的输出性能；首先搭建了针对液体流量测试的试验台，其次选取性质稳定、几乎不挥发、不会对试验环境产生污染的甘油作为配比溶液；通过实验的方法对两种共振泵激振单元和泵送单元的各结构参数进行了最优选择，得到了其最大输出流量和输出压力；第二部分，试验、测试了对气体的输出性能；通过构建的气体输送试验平台进行了气体的输送实验，得到了对气体的输送流量；最后对同等工作条件下共振泵输送液体和气体出现的流量差异进行了分析说明。 5.根据压电共振泵的工作特性，设计了专用驱动电源，主要包括其整体结构设计、核心处理器的选用、逆变式驱动电路的选择等。
[Abstract]:The diaphragm pump is an important type of fluid pump, mainly to meet the miniaturization, low output performance requirements, in recent years, bio pharmaceutical, fine chemical, aerospace, and application areas of MEMS and other more widely, showing good prospects for development. The main diaphragm pump diaphragm pump motor driven by cam mechanism (referred to as the "electromagnetic diaphragm pump") membrane pump drive and piezoelectric vibrator (referred to as the "pump") two categories, of which the output effect of piezoelectric pump for liquid medium, the output effect of gas is very poor, and there is output pressure is low, the piezoelectric wafer is easy to heat, fragmentation so, has not been widely applied in the market; electromagnetic diaphragm pump has complicated structure, high cost, noise and other problems, which limits the applications. In this paper the characteristics and system structure of resonant piezoelectric pump with simple combination, using a The piezoelectric vibration diaphragm resonance formed the driving ability of the new piezoelectric resonant diaphragm pump (referred to as the "piezoelectric resonance pump"), the basic principle of the piezoelectric pump resonance and composing method, prototype design and test of the National Natural Science Fund Project "the piezoelectric type gas diaphragm pump design theory with the research on the key technology" (project number: 51175213) part of the research work. The contents are as follows:
1. of the piezodisc equilibrium condition and bending deformation are analyzed. The piezoelectric resonance pump calculated by establishing a finite element model of piezoelectric vibrator, the vibration mode of the multi order modal analysis method; using the deflection formula under the condition of fixed support points surrounding the heart of piezoelectric vibrator the solution, through experiments, the influence of driving voltage on the deflection of circular piezoelectric vibrator at the center of the map. At the end of the piezoelectric vibrator were measured by impedance analysis, piezoelectric impedance characteristics and natural frequency.
The 2. main structure of piezoelectric resonant pump as the excitation unit and pump unit are described in the two part, function and working principle of two units; the vibration unit dynamics model was established and analyzed each component's stiffness, obtained the magnification imaging system of pumping unit; that is the deflection and diaphragm membrane and its approximate formula for calculating the output flow of fluid; at the end of the exciting unit of the resonance frequency and the vibration displacement was measured.
According to the 3. piezoelectric resonance pump circular resonance plate spring is not easy to exchange for the shortcomings of using the stiffness variable magnetic spring, designed magnetic spring type piezoelectric resonant diaphragm pump (referred to as the "magnetic resonance type piezoelectric pump). The magnetic spring characteristics were studied, established the mathematical model the magnetic spring, obtained by calculating the magnetic spring axial stiffness and axial spacing between the test rig and the use of electronic and machine carved a table, on the magnetic spring axial force were measured; secondly, the working principle of magnetic resonance type piezoelectric pump is described, and its dynamic model was established. The calculation shows that the resonance frequency of the magnetic spring axial spacing can be adjusted by changing the pump resonance; piezoelectric pump resonance finite element modeling analysis of the magnetic type, that when the excitation unit in the first mode of operation, the quality of the center block vibration The amplitude is the largest. Finally, the structure of the magnetic force piezoelectric resonance pump is designed, and the prototype is made. The resonant frequency and vibration displacement of the excitation unit are measured. Finally, the vibration amplitude ratio is measured.
4. for the piezoelectric pump and magnetic resonance type piezoelectric resonance pump has two parts, the first part, test, test output performance of different viscosity of the liquid; the first step is to build the test platform of liquid flow test, then select stable, almost no volatilization, no pollution to the environment as the ratio of glycerol test solution the various structure parameters; feeding unit of two kinds of resonance vibration pump unit and the pump through the experimental method of optimal choice, to get the maximum output flow rate and pressure; the second part test on output performance of gas test; the gas transport experiment by constructing a gas conveying test platform, get the flow of gas transportation; finally on the same working conditions of resonant pump flow between liquid and gas appeared were analyzed.
5., according to the working characteristics of piezoelectric resonance pump, a special driving power is designed, including the overall structure design, the selection of core processor and the selection of inverter driving circuit.

【学位授予单位】：吉林大学
【学位级别】：博士
【学位授予年份】：2013
【分类号】：TH323

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