抗过载微陀螺结构的高灵敏设计与仿真

发布时间：2018-04-23 19:59

本文选题：微机电系统(MEMS)陀螺 + 结构设计　；参考：《压电与声光》2016年05期

【摘要】：为解决高过载微陀螺难以实现高灵敏检测的问题,设计了一种高灵敏且高过载的微陀螺结构。设计的微陀螺结构驱动模态与检测模态的频率高度匹配,提高了微陀螺的结构灵敏度。该微陀螺采用面内检测方式,驱动与检测模态阻尼类型主要为滑膜阻尼,实现了在大气压环境下微陀螺的高品质因数Q值设计。微陀螺均采用双悬臂梁设计,增加了微陀螺结构的稳定性,进而提高了其抗过载能力。最后通过微陀螺的器件级仿真,得到了所设计陀螺结构在驱动方向过载能力约为100 000g(g=9.8m/s~2),检测方向过载能力约为70 000g的前提下,结构灵敏度为53nm/[(°)/s]。
[Abstract]:In order to solve the problem that high overload micro gyroscope is difficult to realize high sensitivity detection, a high sensitivity and high overload micro gyroscope structure is designed. The structure sensitivity of the micro gyroscope is improved by matching the driving mode of the micro gyro structure with the frequency height of the detection mode. The mode damping of the micro gyroscope is mainly synovial damping. The high quality factor Q design of the micro gyroscope under atmospheric pressure is realized. Both microgyroscopes are designed with double cantilever beams, which increase the stability of microgyroscopes and improve their overload resistance. Finally, through the device level simulation of the micro gyroscope, it is obtained that the structure sensitivity is 53nm/ [(掳/ s)] when the driving direction overload capacity is about 100000 g / g and the detection direction overload capacity is about 70000g.
【作者单位】：中北大学电子测试技术国家重点实验室;中北大学仪器与电子学院;中北大学微系统集成研究中心;
【基金】：国家自然基金资助项目(61571405;62201070516) 山西省攻关基金资助项目(20130322005-4)
【分类号】：TJ765;TH-39

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