中阶梯光栅机械刻划工艺参数优化研究

发布时间：2018-04-25 01:14

本文选题：机械刻划 + 中阶梯光栅　；参考：《长春理工大学》2012年硕士论文

【摘要】：光栅机械刻划是用金刚石刻划刀对光栅基底上的金属膜进行挤压、抛光,使其发生形变而形成阶梯状刻槽的过程。针对79g/mm中阶梯衍射光栅高精度刻划的要求,本文以直线刃刻划刀为切入点,对光栅机械刻划过程进行深入研究。第一,分析了光栅机械刻划过程中镀膜材料的成形过程,并依据塑性成形理论建立了刻划深度与光栅槽深之间的数学关系模型；第二,借助有限元手段对79g/mm中阶梯衍射光栅刻划过程进行模拟仿真,分析刀具参数、安装参数等对光栅槽形形状的影响规律以及镀膜材料的流动规律；第三,基于正交试验法对刀具参数、安装参数进行优化,提出光栅槽形控制策略；第四,在分析优化的基础上进行刻划刀样刀试制,准备刻划试验。
[Abstract]:The mechanical scribing of the grating is the process of extruding and polishing the metal film on the grating substrate by using a diamond cutting knife . In order to meet the requirement of high precision scoring of the step diffraction grating in 79g / mm , this paper studies the process of grating mechanical scribing . First , the forming process of the coating material in the process of grating mechanical scribing is analyzed , and the mathematical relation model between the scoring depth and the depth of the grating groove is established according to the plastic forming theory .
Secondly , the step diffraction grating scribing process of 79g / mm is simulated and simulated by means of finite element method , and the influence law of cutter parameters and installation parameters on the shape of grating groove and the flow law of coating material are analyzed .
Thirdly , based on the orthogonal test method , the parameters of the tool and the parameters of the installation are optimized , and the grating slot - shaped control strategy is proposed .
Fourthly , on the basis of the analysis and optimization , the scale knife - like knife test is carried out , and the scribing test is prepared .

【学位授予单位】：长春理工大学
【学位级别】：硕士
【学位授予年份】：2012
【分类号】：TH16

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