MEMS扭转微镜的滑模控制研究

发布时间：2018-06-07 20:43

本文选题：微机电系统 + 微镜　；参考：《华南理工大学》2014年博士论文

【摘要】：MEMS微镜在光开关、高清晰显示、光学相干断层扫描、数字投影和条形码扫描等领域获得广泛应用，引起了国际学术界和工业界的关注。光开关应用中要求MEMS微镜具有良好的暂态响应和扫描定位精度，，成像应用中需要MEMS微镜跟踪给定轨迹(正弦或三角波轨迹)进行扫描。考虑到基于MEMS微镜应用中的性能要求，本文基于滑模控制理论设计控制算法并应用于MEMS扭转微镜，主要内容包括以下几个方面： (1)将一阶滑模控制算法和二阶Twsiting控制算法应用于带侧面电极的2D静电驱动MEMS扭转微镜，目的是提高系统的暂态响应和定位精度。通过MATLAB仿真和基于可编程门阵列(FPGA)硬件的实验验证所提出算法的有效性。仿真和实验结果表明，与开环控制相比,闭环控制系统具有较好的暂态响应和定位精度。与一阶滑模控制相比，二阶Twsiting控制下的系统具有较好的定位精度。 (2)针对带侧面电极2D静电驱动MEMS扭转微镜设计基于积分滑模面的二阶滑模控制算法，该算法由等价控制和切换控制两部分组成。采用Lyapunov理论证明系统的稳定性，通过定点控制、跟踪控制和扰动实验来验证闭环系统的性能。实验结果表明二阶积分滑模控制能够改善系统暂态响应,提高定位和跟踪扫描的精度。 (3)将积分滑模控制算法应用于电磁驱动MEMS扭转微镜，建立基于电磁驱动MEMS扭转微镜的激光扫描成像系统,实现闭环控制下的1D扫描成像。实验结果表明，与传统开环控制和PID控制相比，积分滑模控制下的系统具有较好的暂态响应和定位精度，而且能够精确跟踪给定正弦和三角波轨迹进行扫描。
[Abstract]:MEMS micromirror has been widely used in optical switch, high definition display, optical coherence tomography, digital projection and bar code scanning. MEMS microscopes are required to have good transient response and scanning accuracy in optical switch applications. MEMS microscopes are required to track given tracks (sinusoidal or triangular wave trajectories) for scanning in imaging applications. Considering the performance requirements of MEMS micromirror applications, this paper designs a control algorithm based on sliding mode control theory and applies it to MEMS torsional micromirror. The main contents are as follows: (1) the first order sliding mode control algorithm and the second order Twsiting control algorithm are applied to 2D electrostatically driven MEMS torsion micromirror with side electrodes to improve the transient response and positioning accuracy of the system. The effectiveness of the proposed algorithm is verified by MATLAB simulation and experiments based on programmable gate array (FPGA) hardware. Simulation and experimental results show that the closed-loop control system has better transient response and positioning accuracy than open-loop control. Compared with the first order sliding mode control, the second order Twsiting control system has better positioning accuracy. The second order sliding mode control algorithm based on integral sliding mode surface is designed for 2D electrostatic actuated MEMS torsion micromirror with side electrode. The algorithm consists of equivalent control and switching control. The stability of the system is proved by Lyapunov theory. The performance of the closed-loop system is verified by fixed-point control, tracking control and perturbation experiments. The experimental results show that the second order integral sliding mode control can improve the transient response of the system and improve the accuracy of positioning and scanning. A laser scanning imaging system based on electromagnetically driven MEMS torsion micromirror is established to realize 1D scanning imaging under closed loop control. The experimental results show that the integrated sliding mode control system has better transient response and positioning accuracy than the traditional open-loop control and pid control, and it can accurately track the given sine and triangular wave trajectories for scanning.
【学位授予单位】：华南理工大学
【学位级别】：博士
【学位授予年份】：2014
【分类号】：TH-39;TP273

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