高刚度气浮垫动态性能研究
本文选题:气浮垫 + 高刚度 ; 参考:《西安工业大学》2011年硕士论文
【摘要】:精密、超精密技术的发展日益进步,对气浮垫的刚度、精度及稳定性都提出更高的要求。由于气体的可压缩性,对提高气浮垫性能的研究带来很大的困难,因此,研究气浮垫的刚度及稳定性是气浮垫研究领域的难点问题。 本课题组在前期通过用弹性薄板来实现可变均压槽、可变节流器复合作用的方法对新型气浮垫进行研究,并发现用弹性薄板来实现可变均压槽的结构的气浮垫,其在静态性能(即刚度和承载力)上明显要强过刚性均压槽气浮垫。 本文所研究气浮垫是以工程应用为最终目的来研究的,在此基础上本论文选择以弹性均压槽气浮垫作为研究内容,提出对弹性均压槽气浮垫动态性能进行研究,并比较弹性均压槽气浮垫和刚性均压槽气浮垫的动态性能,为气浮垫的动力学研究和稳定性研究提供有力的数据依据。由于气浮垫通常工作在低速状态下,此时气浮垫的动态刚度和静态刚度大小基本相等,所以本文只需研究其阻尼系数变化即可。本文首先介绍了气浮垫的工作原理,并利用ANSYS仿真软件对气浮垫弹性变形情况和气腔槽宽变化情况进行了一定研究与探索,得到气腔槽宽规律性结论,为气浮垫的结构设计提供参考数据。其次,推导并化简了适宜于上述气浮垫的动态雷诺方程,随后使用FLUENT软件对稳态方程进行求解,并将解得的压力分布数据和前人用MATLAB求得的数据进行对比确认,以此来保证求解数据的真实性和正确性,随后又对瞬态方程求解进行初步的探索与研究。最后,在现有的实验台上对新型气浮垫的阻尼系数进行测试,测量了气膜厚度及其对应的载荷,并对实验台的工作原理、使用方法和实验数据的处理进行了深入研究,并将弹性均压槽气浮垫和刚性均压槽气浮垫的实验结果进行了对比分析,从实验上证明了弹性均压槽气浮垫动态阻尼系数高于刚性均压槽气浮垫,得出弹性均压槽气浮垫稳定性高的结论。
[Abstract]:With the development of precision and ultra-precision technology, the stiffness, precision and stability of air cushion are required more and more. Because of the compressibility of gas, it is difficult to improve the performance of air cushion. The research on the stiffness and stability of air cushion is a difficult problem in the field of air floatation. It is also found that the flexible thin plate is used to realize the air floatation cushion of the structure of the variable equalizing pressure slot. The static performance (i.e. stiffness and bearing capacity) of the gasket is obviously stronger than that of the over-rigid uniform pressure tank air floatation cushion, which is studied in this paper for the final purpose of engineering application. On the basis of this, this paper chooses the elastic equal pressure trough air floatation cushion as the research content, puts forward the research on the dynamic performance of the elastic equal pressure trough air floating pad, and compares the dynamic performance of the elastic equal pressure trough air floating pad with the rigid equal pressure trough air floating pad. It provides a powerful data basis for the dynamic and stability study of air cushion. Because the air cushion usually works at low speed, the dynamic stiffness and the static stiffness of the air cushion are basically equal, so we only need to study the change of damping coefficient in this paper. In this paper, the working principle of air cushion is introduced, and the elastic deformation of air cushion and the change of air cavity width are studied and explored by ANSYS simulation software, and the regular conclusion of air chamber groove width is obtained. It provides reference data for the structure design of air cushion. Secondly, the dynamic Reynolds equation is deduced and simplified, and the steady state equation is solved by fluent software, and the pressure distribution data obtained by MATLAB are compared with those obtained by MATLAB. In order to ensure the authenticity and correctness of the solution data, the transient equation solution is explored and studied. Finally, the damping coefficient of the new type of air cushion is tested on the existing test bench, the thickness of the film and its corresponding load are measured, and the working principle, using method and the processing of the experimental data are deeply studied. The experimental results of elastic equal pressure tank air floating pad and rigid uniform pressure tank air floating pad are compared and analyzed. The experimental results show that the dynamic damping coefficient of the elastic equal pressure tank air floating pad is higher than that of the rigid uniform pressure tank air floating pad. It is concluded that the stability of the air cushion is high.
【学位授予单位】:西安工业大学
【学位级别】:硕士
【学位授予年份】:2011
【分类号】:TH133.35
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