真空预载荷静压气体轴承的研究

发布时间：2018-07-04 21:34

本文选题：静压气体轴承 + 真空预载荷　；参考：《哈尔滨工业大学》2011年硕士论文

【摘要】：静压气体轴承具有高精度、高速度、高运动分辨率、爬行小、污染少、热稳定好等优点,从而广泛应用于精密测量仪器、超精密加工和微细加工等工程场合。以静压气体止推轴承为基础的静压气体导轨得到快速发展。但是,无论是平面封闭型、圆筒封闭型还是重力平衡型气体导轨都存在着结构复杂,加工难度大等问题。本文采用真空预载荷技术,静压气体止推轴承结构中加入真空腔,不但有效地简化静压气体导轨结构,并且使得导轨的承载特性得到很大提高。本文以环矩形气体轴承和圆盘形气体轴承为例,详细的分析加入真空腔对静压气体轴承承载特性的的影响关系,主要做以下工作: 首先,根据压力边界条件,应用加权余量法对无因次化的雷诺方程进行降阶;然后,引入气膜压力插值函数,采用有限单元法把气体润滑问题转换为具有非线性项的压力方程组。采用MATLAB软件对压力方程进行编程求解。该程序能够计算不同真空腔面积下,气体轴承的静态特性。对环矩形真空预载荷气体轴承进行了仿真分析,分析了真空腔面积大小对承载特性的影响,以及不同设计参数下气体轴承的静态特性变化规律,然后比较了真空预载荷的作用效果。对圆盘形真空预载荷气体轴承进行计算分析,主要研究了不同真空腔面积对轴承特性的影响,详细分析气体轴承静特性变化规律及真空预载荷效果。最后,加工出实验样品,进行实验测试,通过对比分析实验测量结果和理论计算结果,验证了理论分析模型正确性,以及真空预载荷的可行性。本课题的研究对进一步完善静压气体轴承理论具有一定的理论价值;对真空预载荷气体导轨的工程应用提供理论支持;对发展静压气体轴承具有重要意义。
[Abstract]:The hydrostatic gas bearing has the advantages of high precision, high speed, high motion resolution, small crawling, less pollution, good thermal stability and so on, so it is widely used in engineering applications such as precision measuring instruments, ultra-precision machining and micro-machining. The hydrostatic gas guide based on hydrostatic gas thrust bearing has been developed rapidly. However, there are many problems such as complicated structure and difficulty in machining, both in plane sealing, cylinder sealing and gravity equilibrium gas guideways. In this paper, vacuum preload technology and vacuum cavity are added to the structure of hydrostatic gas thrust bearing, which not only simplifies the structure of static pressure gas guide rail, but also greatly improves the bearing characteristics of the guide rail. In this paper, taking ring rectangular gas bearing and disk gas bearing as examples, the influence of vacuum chamber on bearing characteristics of hydrostatic gas bearing is analyzed in detail. The main work is as follows: firstly, according to the pressure boundary condition, The dimensionless Reynolds equation is reduced by using the weighted residual method, and then the gas lubrication problem is transformed into a pressure equation system with nonlinear terms by introducing the film pressure interpolation function and using the finite element method. The pressure equation is solved by MATLAB software. The program can calculate the static characteristics of gas bearing under different vacuum cavity area. The simulation analysis of ring rectangular vacuum preload gas bearing is carried out, and the influence of vacuum cavity area on bearing characteristics is analyzed, and the static characteristics of gas bearing under different design parameters are analyzed. Then the effect of vacuum preload is compared. The influence of different vacuum cavity area on the bearing characteristics is studied in this paper. The static characteristics of the gas bearing and the vacuum preload effect are analyzed in detail. Finally, the experimental samples are processed and tested. The correctness of the theoretical analysis model and the feasibility of vacuum preload are verified by comparing and analyzing the experimental results and theoretical calculation results. The research of this subject has certain theoretical value for further improving the theory of static gas bearing, provides theoretical support for the engineering application of vacuum preload gas guide rail, and is of great significance to the development of hydrostatic gas bearing.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2011
【分类号】：TH133.36

【相似文献】