基于MEMS的阵列式扫描探针显微镜测头理论与技术研究

发布时间：2018-08-18 15:42

【摘要】：扫描探针显微镜（SPM）凭借其原子级的分辨力迅速在表面科学、材料科学、生命科学等研究领域中得到广泛的应用，但是随着科学研究和工业应用对成像范围、扫描速度等需求的提高，迫切希望SPM性能也随之提高。本文研究了一种基于微机电系统（MEMS）技术的阵列式SPM测头，借助静电梳齿结构的大行程、高线性度、易集成性和阵列式探针的特点，结合大范围纳米定位平台，搭建了大范围阵列式探针SPM。在提高SPM的扫描效率、扩大测量范围等方面进行了较深入的研究工作。主要工作包括： 1.研究了测头的力学等效模型，推导了测头三个维度上的弹性系数计算公式，，并结合有限元方法进行仿真，优化测头结构的设计参数。设计了MEMS阵列式探针SPM测头。并合理配置测头整体结构三个维度上的弹性系数，使测头更稳定的工作。 2.构建了测头的电学模型，并研究了其电学特性，分析了测头针尖所连接的主梁在受力发生平移和偏转时，给测头电容模型带来的非线性影响。分析测头在加载静电场时的侧向吸合力和悬浮力等。确定了测头的扫描模式、极限扫描行程和极限施加电压。 3.提出了阵列式静电梳齿结构测头的三种工作模式：恒高模式、恒力模式和动态模式。分析三种工作模式的特点。并对恒高模式和恒力模式进行了实验研究 4.提出了一种利用纳米测量机和超精密电磁天平快速可溯源的探针弹性系数标定方法。保证了测头恒力工作模式的稳定性和测量准确性。 5.将测头与大范围精密定位测量平台—纳米测量机结合，设计了阵列式探针SPM。实验标定了测头的灵敏度、迟滞性、重复性、分辨力、低频振动性能等各项参数。在恒力工作模式下，实现了多个探针同时独立地对一维栅格样板、二维栅格样板进行扫描成像，证明了测头的二维扫描成像能力。通过对一维栅格样品600μm行程的线扫描，验证了测头具有一定的大范围扫描能力。
[Abstract]:The scanning probe microscope (SPM) has been widely used in many fields such as surface science, material science, life science and so on, because of its atomic resolution. With the improvement of scanning speed and other requirements, it is hoped that the performance of SPM will also be improved. In this paper, an array SPM probe based on (MEMS) technology of MEMS is studied. With the help of the characteristics of large stroke, high linearity, easy integration and array probe of electrostatic comb structure, a large range of nanometer positioning platform is developed. A large range of array probe SPM was constructed. In order to improve the scanning efficiency of SPM and expand the measurement range, the research work has been carried out in depth. The main work includes: 1. In this paper, the equivalent mechanical model of the probe is studied, and the calculation formula of elastic coefficient on the three dimensions of the probe is derived, and the design parameters of the probe structure are optimized by using the finite element method. MEMS array probe SPM probe is designed. And reasonable configuration of the overall structure of the probe on the three dimensions of the elastic coefficient, so that the probe more stable work. 2. The electrical model of the probe is constructed and its electrical characteristics are studied. The nonlinear effect of the main beam connected by the probe tip on the capacitance model of the probe is analyzed when the force is shifted and deflected. The lateral suction force and suspension force of the probe under electrostatic field loading are analyzed. The scanning mode, the limit scan stroke and the limit applied voltage of the probe are determined. 3. 3. Three working modes of array electrostatic comb structure probe are proposed: constant height mode, constant force mode and dynamic mode. The characteristics of the three working modes are analyzed. The constant height mode and constant force mode are studied experimentally. A method for calibrating the elastic coefficient of the probe using nanometers and ultra-precision electromagnetic balance is proposed. The stability and accuracy of the constant force working mode of the probe are guaranteed. 5. 5. An array probe SPM was designed by combining the probe with a wide range of precision positioning and measuring platform-nanometers. The sensitivity, hysteresis, repeatability, resolution and low frequency vibration performance of the probe are calibrated experimentally. In the constant force mode, multiple probes are realized to independently scan one dimensional grid template and two dimensional grid template at the same time, which proves the two dimensional scanning imaging ability of the probe. The line scanning of one-dimensional raster sample with 600 渭 m stroke proves that the probe has a certain wide range scanning ability.
【学位授予单位】：天津大学
【学位级别】：博士
【学位授予年份】：2013
【分类号】：TH-39;TH742

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