静电驱动柔性振膜微泵的理论分析与实验研究
发布时间：2018-11-29 07:55
【摘要】：静电微泵具有能量密度高、响应时间短、能量消耗低等特点,在生物流体控制和电子器件热管理方面具有广泛的应用前景。利用柔性振膜和具有连续曲面的腔体构成的静电驱动柔性振膜微泵,缩小了振膜与腔体的间距,增大了静电驱动力和振膜变形量,从而提高了微泵的压缩性能。本文针对静电驱动柔性振膜微泵分别进行了理论分析、加工封装和实验测试三个方面的研究。论文主要研究内容如下:(1)将均匀压力作用下的圆薄膜变形半解析解与最小能量法相结合,建立了用于分析具有连续曲面腔体结构的静电驱动柔性振膜微泵的压升性能的理论模型。讨论了不同设计参数对微泵压升的影响,得出介电层厚度、腔体的半径和深度均相对较小的双腔结构静电驱动振膜微泵更有利于产生相对较高的压升的结论;(2)分析讨论了具有柔性阀片的静电驱动微型阀对微泵排气性能的影响。微型阀的引入会导致微泵的压升和容积效率均出现一定程度的降低;而柔性阀片结构则有利于降低微型阀的临界关阀电压,提高微泵运行的可靠性;(3)将小型转子压缩机中使用的串流方法和双振膜驱动结构相结合,设计得到了具有双膜串流结构的静电驱动柔性振膜微泵。利用串流,在不影响微泵排气压力性能的前提下,提高了微泵的容积效率和有效排气量;(4)结合微加工工艺和精密机械加工技术,实现了连续曲面腔体和集成了多个电极的柔性振膜的加工制作;配制ATSP溶液,选择合适的工艺,完成了微泵的键合;利用AF 163-2K热塑性薄膜实现了微泵外围围护结构以及微通道换热器的封装;(5)对静电力驱动下振膜与腔体的贴合过程进行了观测,发现振膜电极和腔体的尺寸偏差会导致该过程呈现显著的非轴对称特性;(6)对封装后微泵的压升性能进行了实验测试;微泵进排气压差随驱动电压幅值的升高而增大,与理论分析结果呈现出相同的规律;同时微泵进排气压差也随驱动频率的增大而增大;此外,对压力测试信号在驱动频率附近进行滤波,获得了与驱动频率接近的正弦波信号,信号波动幅度同样随驱动电压幅值和频率的升高而增大。
[Abstract]:Electrostatic micropump has many advantages, such as high energy density, short response time and low energy consumption. It is widely used in biological fluid control and thermal management of electronic devices. The flexible diaphragm micropump is driven by a flexible diaphragm and a cavity with a continuous curved surface, which reduces the distance between the diaphragm and the cavity, increases the electrostatic driving force and the deformation of the diaphragm, and thus improves the compression performance of the micropump. In this paper, the electrostatic driven flexible diaphragm micropumps are studied in three aspects: theoretical analysis, machining packaging and experimental testing. The main contents of this thesis are as follows: (1) the semi-analytical solution of circular film deformation under uniform pressure is combined with the minimum energy method. A theoretical model for analyzing the pressure-lift performance of a electrostatic driven flexible diaphragm micropump with a continuous curved cavity is established. The influence of different design parameters on the pressure rise of micropump is discussed. It is concluded that the electrostatic driven diaphragm micropump with relatively small dielectric layer thickness, cavity radius and depth is more favorable for producing higher pressure rise. (2) the effect of electrostatic driven micro valve with flexible valve on the exhaust performance of micro pump is analyzed and discussed. The introduction of micro valve will reduce the pressure rise and volumetric efficiency of micro pump to a certain extent, while the structure of flexible valve sheet will help to reduce the critical closing voltage of micro valve and improve the reliability of micro pump operation. (3) combining the series flow method used in the small rotor compressor with the double diaphragm drive structure, the electrostatic driven flexible diaphragm micropump with the double film series flow structure is designed. The volume efficiency and effective exhaust volume of the micropump are improved by using the series flow without affecting the exhaust pressure performance of the micropump. (4) the fabrication of continuous curved cavity and flexible diaphragm integrated with multiple electrodes is realized by combining micromachining technology and precision machining technology, and the bonding of micropump is accomplished by preparing ATSP solution and selecting suitable process. The AF 163-2K thermoplastic film is used to realize the envelope structure of the micropump and the encapsulation of the microchannel heat exchanger. (5) the bonding process between the diaphragm and the cavity driven by hydrostatic power is observed. It is found that the dimension deviation of the diaphragm electrode and the cavity will lead to the obvious non-axisymmetric characteristics of the process. (6) the pressure-lift performance of the micropump after encapsulation is tested, and the pressure difference between inlet and exhaust increases with the increase of the driving voltage amplitude, which shows the same rule as the theoretical analysis. At the same time, the inlet and exhaust pressure difference of micropump also increases with the increase of driving frequency. In addition, a sinusoidal wave signal close to the driving frequency is obtained by filtering the pressure test signal near the driving frequency, and the amplitude of the signal fluctuation increases with the increase of the driving voltage amplitude and frequency.
【学位授予单位】：上海交通大学
【学位级别】：博士
【学位授予年份】：2013
【分类号】：TH38;O441.1
本文编号：2364398
[Abstract]:Electrostatic micropump has many advantages, such as high energy density, short response time and low energy consumption. It is widely used in biological fluid control and thermal management of electronic devices. The flexible diaphragm micropump is driven by a flexible diaphragm and a cavity with a continuous curved surface, which reduces the distance between the diaphragm and the cavity, increases the electrostatic driving force and the deformation of the diaphragm, and thus improves the compression performance of the micropump. In this paper, the electrostatic driven flexible diaphragm micropumps are studied in three aspects: theoretical analysis, machining packaging and experimental testing. The main contents of this thesis are as follows: (1) the semi-analytical solution of circular film deformation under uniform pressure is combined with the minimum energy method. A theoretical model for analyzing the pressure-lift performance of a electrostatic driven flexible diaphragm micropump with a continuous curved cavity is established. The influence of different design parameters on the pressure rise of micropump is discussed. It is concluded that the electrostatic driven diaphragm micropump with relatively small dielectric layer thickness, cavity radius and depth is more favorable for producing higher pressure rise. (2) the effect of electrostatic driven micro valve with flexible valve on the exhaust performance of micro pump is analyzed and discussed. The introduction of micro valve will reduce the pressure rise and volumetric efficiency of micro pump to a certain extent, while the structure of flexible valve sheet will help to reduce the critical closing voltage of micro valve and improve the reliability of micro pump operation. (3) combining the series flow method used in the small rotor compressor with the double diaphragm drive structure, the electrostatic driven flexible diaphragm micropump with the double film series flow structure is designed. The volume efficiency and effective exhaust volume of the micropump are improved by using the series flow without affecting the exhaust pressure performance of the micropump. (4) the fabrication of continuous curved cavity and flexible diaphragm integrated with multiple electrodes is realized by combining micromachining technology and precision machining technology, and the bonding of micropump is accomplished by preparing ATSP solution and selecting suitable process. The AF 163-2K thermoplastic film is used to realize the envelope structure of the micropump and the encapsulation of the microchannel heat exchanger. (5) the bonding process between the diaphragm and the cavity driven by hydrostatic power is observed. It is found that the dimension deviation of the diaphragm electrode and the cavity will lead to the obvious non-axisymmetric characteristics of the process. (6) the pressure-lift performance of the micropump after encapsulation is tested, and the pressure difference between inlet and exhaust increases with the increase of the driving voltage amplitude, which shows the same rule as the theoretical analysis. At the same time, the inlet and exhaust pressure difference of micropump also increases with the increase of driving frequency. In addition, a sinusoidal wave signal close to the driving frequency is obtained by filtering the pressure test signal near the driving frequency, and the amplitude of the signal fluctuation increases with the increase of the driving voltage amplitude and frequency.
【学位授予单位】：上海交通大学
【学位级别】：博士
【学位授予年份】：2013
【分类号】：TH38;O441.1
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