微悬臂梁质量传感器测量原理的有限元分析

发布时间：2019-03-07 09:51

【摘要】：微悬臂梁是MEMS（微机电系统）器件中较典型的结构，常用作传感器和执行器。它具有灵敏度高，体积小，成本低等优点，在质量检测领域受到了越来越多的关注。本文以微悬臂梁质量传感器为研究对象，根据微悬臂梁因粘附物体产生固有频率改变这一特性，提出了一种根据固有频率变化值对粘附物的位置和质量反求的方法。该方法具体来说是通过建立微悬臂梁质量传感器的有限元模型，编写相应的算法程序，进而完成对粘附物位置和质量的反求，最终实现了对微悬臂梁上粘附物质的测量。本文主要完成了以下研究工作：（1）建立了微悬臂梁振动特性的解析模型和有限元模型，并得到了微悬臂梁固有频率的有限元求解结果；通过对有限元求解结果与解析结果及实验结果的分析比较，验证了有限元求解方法的可行性；（2）定义了微悬臂梁上的粘附物质量和位置的反求问题，，编写了求解反求问题的算法程序；（3）分析了反求问题算法的求解结果，验证了所编写算法的正确性，发现悬臂梁不同区域对粘附物的敏感度不同。总而言之，本文的研究内容和研究方法对以后理论研究和实际应用都具有一定的意义。
[Abstract]:Micro-cantilever is a typical structure in MEMS (Micro-Electro-Mechanical system) devices, which is often used as sensor and actuator. Because of its high sensitivity, small size and low cost, it has attracted more and more attention in the field of quality inspection. In this paper, the micro-cantilever beam mass sensor is taken as the research object. According to the characteristic that the micro-cantilever beam has the natural frequency change due to the adhesion object, a method is proposed to reverse the position and mass of the adhesive according to the natural frequency change value. In this method, the finite element model of the micro-cantilever beam mass sensor is established, and the corresponding algorithm program is compiled to complete the inverse calculation of the position and quality of the adhesive. Finally, the measurement of the adhesive material on the micro-cantilever beam is realized. The main work of this paper is as follows: (1) the analytical model and the finite element model of the vibration characteristics of the micro-cantilever beam are established and the results of the finite element analysis of the natural frequency of the micro-cantilever beam are obtained. The feasibility of the finite element method is verified by comparing the results of the finite element analysis with the analytical results and the experimental results. (2) the inverse problem of the mass and position of the adhesive on the micro-cantilever is defined, and the algorithm program for solving the inverse problem is compiled. (3) the results of the inverse algorithm are analyzed, and the correctness of the algorithm is verified. It is found that the sensitivity of the cantilever beam to the adhesive is different in different regions. In a word, the research contents and methods of this paper have certain significance for future theoretical research and practical application.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TP212;TH-39

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