能量平衡法静电驱动柔性振膜微泵特性分析
发布时间：2019-04-24 04:57
【摘要】：从能量平衡的角度建立了静电驱动柔性振膜微泵的平衡方程,基于对压缩过程中振膜动能的考虑,改进了最小能量法压缩模型,结合均匀压力载荷下圆薄膜大挠度形变理论对静电驱动柔性振膜微泵进行理论分析。对振膜与腔体壁面贴合的压缩过程中各能量相互转化的关系进行分析,并与最小能量法模型进行了对比。结果表明,能量平衡法考虑了薄膜振动过程中的动能,故薄膜与腔体具有更大的贴合面积,且以薄膜与腔体完全贴合时作为零应力参考状态降低压缩过程中的薄膜形变势能,计算得到的静电微泵的压缩效率更高,在驱动电压为300 V时,改进的双腔模型中振膜贴合半径为4.06 mm,所得最大压升为87.08 k Pa。基于改进的模型,对双腔微泵压升的影响因素进行讨论,发现降低柔性薄膜厚度会使输出压力有所上升,并且减小腔体表面介电层厚度、减小腔体深度与半径可以有助于提高微泵的压升。
[Abstract]:The equilibrium equation of the electrostatic-driven flexible diaphragm micropump is established from the angle of energy balance. Based on the consideration of the kinetic energy of the membrane in the compression process, the minimum energy compression model is improved. Based on the theory of large deflection deformation of circular thin film under uniform pressure, the electrostatic-driven flexible vibration membrane micropump is theoretically analyzed. In this paper, the relation of the energy transformation between the diaphragm and the cavity wall during the compression process is analyzed and compared with the minimum energy method model. The results show that the energy balance method takes into account the kinetic energy in the vibration process of the thin film, so the film and the cavity have a larger fitting area, and the film deformation potential energy in the compression process is reduced by the zero stress reference state when the film is fully fitted to the cavity. The calculated compression efficiency of the electrostatic micropump is higher. When the driving voltage is 300V, the maximum pressure rise is 87.08 k Pa. in the improved double cavity model with a film fitting radius of 4.06 mm,. Based on the improved model, the influencing factors of the pressure rise of the dual-cavity micro-pump are discussed. It is found that decreasing the thickness of the flexible film will increase the output pressure and decrease the thickness of the dielectric layer on the surface of the cavity. Reducing the depth and radius of the cavity can help to improve the pressure rise of the micro-pump.
【作者单位】： 上海交通大学机械与动力工程学院制冷与低温研究所;
【基金】：国家自然科学基金项目(50976067);国家自然科学基金项目(51576123)
【分类号】：TH38
本文编号：2464121
[Abstract]:The equilibrium equation of the electrostatic-driven flexible diaphragm micropump is established from the angle of energy balance. Based on the consideration of the kinetic energy of the membrane in the compression process, the minimum energy compression model is improved. Based on the theory of large deflection deformation of circular thin film under uniform pressure, the electrostatic-driven flexible vibration membrane micropump is theoretically analyzed. In this paper, the relation of the energy transformation between the diaphragm and the cavity wall during the compression process is analyzed and compared with the minimum energy method model. The results show that the energy balance method takes into account the kinetic energy in the vibration process of the thin film, so the film and the cavity have a larger fitting area, and the film deformation potential energy in the compression process is reduced by the zero stress reference state when the film is fully fitted to the cavity. The calculated compression efficiency of the electrostatic micropump is higher. When the driving voltage is 300V, the maximum pressure rise is 87.08 k Pa. in the improved double cavity model with a film fitting radius of 4.06 mm,. Based on the improved model, the influencing factors of the pressure rise of the dual-cavity micro-pump are discussed. It is found that decreasing the thickness of the flexible film will increase the output pressure and decrease the thickness of the dielectric layer on the surface of the cavity. Reducing the depth and radius of the cavity can help to improve the pressure rise of the micro-pump.
【作者单位】： 上海交通大学机械与动力工程学院制冷与低温研究所;
【基金】：国家自然科学基金项目(50976067);国家自然科学基金项目(51576123)
【分类号】：TH38
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