掺杂单晶硅纳米梁的谐振频率特性

发布时间：2018-01-14 18:08

本文关键词：掺杂单晶硅纳米梁的谐振频率特性　出处：《新疆大学学报(自然科学版)》2016年04期 　论文类型：期刊论文

【摘要】：掺杂有利于提高单晶硅纳米材料的力学性能.本文主要通过分子动力学方法研究了掺杂浓度和尺寸对纳米单晶硅梁谐振频率的影响,结果表明:谐振频率随着单晶硅纳米梁掺杂浓度的增大而增大,但值变化很小,对梁的谐振频率影响并不明显;同时,谐振频率随着单晶硅纳米梁长度尺寸的增大而减小,随着单晶硅纳米梁厚度尺寸的增大而增大.由此可以得出结论:掺杂浓度会影响纳米单晶硅梁的谐振频率,但是影响较小,而影响其谐振频率的主要因素是纳米单晶硅梁的尺寸.
[Abstract]:Doping can improve the mechanical properties of monocrystalline silicon nanomaterials. The effects of doping concentration and size on resonant frequency of nanocrystalline monocrystalline silicon beams were studied by molecular dynamics. The results show that the resonant frequency increases with the increase of the doping concentration of monocrystalline silicon nanocrystalline beam, but the change of the value is very small, and the effect on the resonant frequency of the beam is not obvious. At the same time, the resonant frequency decreases with the increase of the length of monocrystalline silicon nanocrystalline beam. With the increase of the thickness and size of monocrystalline silicon nanocrystalline beam, it can be concluded that doping concentration will affect the resonant frequency of nanocrystalline silicon beam, but the influence is small. The size of nanocrystalline silicon beam is the main factor affecting its resonant frequency.
【作者单位】：新疆大学物理科学与技术学院;
【基金】：国家自然科学基金(11064014)
【分类号】：O327
【正文快照】： 0引言单晶硅技术是现代集成电路技术的基础,同时纳米硅也是制造NEMS的主要材料之一.纳机电系统(NEMS)已有许多重要的应用,如超大规模传感器^、参数反馈振荡器W、开关等.从长期可靠性的角度来看,这些谐振器的振动特性和机械性能,如杨氏模量和谐振频率的研究是非常重要的,应该

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