微米级超润滑石墨接触面的表征与分析

发布时间：2018-05-25 00:32

  本文选题：超润滑 + 石墨　； 参考：《物理学报》2016年23期

【摘要】：超润滑可能是解决摩擦磨损问题的理想方案.目前已经能够在大气环境下实现基于石墨的微米尺度超润滑,但石墨接触面在超润滑实现过程中的影响还需要深入研究.为此,本文用电子束曝光及反应离子刻蚀方法在高定向热解石墨上加工出微米尺度的氧化硅/石墨方台结构,并用钨针尖推开方台的上部获得超润滑的石墨接触面.然后用原子力显微镜对多个石墨接触面进行了形貌表征,并使用能谱仪及X射线光电子能谱对石墨接触面的边缘进行测试.研究发现,高定向热解石墨的多晶结构在接触面的形成过程中有重要影响,能够决定接触面的质量进而决定超润滑能否实现.石墨接触面的边缘存在大量加工中引入的化学键及在大气中吸附的物理键,这些键是推开石墨方台形成接触面时阻力的来源,并在接触面发生相对滑动时表现为摩擦力.本文通过对具有微米尺寸的超润滑石墨接触面进行研究,明确了接触面内部及边缘影响超润滑实现的规律,对大面积超润滑的实现及应用能够提供有益的帮助.
[Abstract]:Superlubrication may be an ideal solution to the problem of friction and wear. At present, it is possible to realize graphite-based micro-scale superlubrication in atmospheric environment, but the influence of graphite contact surface on the realization of super-lubrication needs to be deeply studied. In this paper, the micron scale silicon oxide / graphite square structure was fabricated on high directional pyrolytic graphite by electron beam exposure and reactive ion etching, and superlubricated graphite contact surface was obtained by pushing the top of the square table with a tungsten needle. The morphologies of several graphite contact surfaces were characterized by atomic force microscope (AFM). The edge of graphite contact surfaces was measured by energy dispersive spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS). It is found that the polycrystalline structure of highly oriented pyrolytic graphite plays an important role in the formation of the contact surface, which can determine the quality of the contact surface and then determine whether the superlubrication can be realized. There are a large number of chemical bonds and physical bonds adsorbed in the atmosphere on the edge of the graphite contact surface. These bonds are the source of resistance when pushing away the graphite square table to form the contact surface and show friction when the contact surface is relatively sliding. In this paper, the superlubricated graphite contact surface with micron size is studied, and the law of the influence of the interface interior and edge on the realization of superlubrication is clarified, which can provide useful help for the realization and application of large area superlubrication.
【作者单位】： 军械工程学院电子与光学工程系;清华大学精密仪器系;清华大学精密测试技术及仪器国家重点实验室;清华大学微纳米力学与多学科交叉创新研究中心;
【基金】：国家自然科学基金(批准号:51375263) 国家重大科学研究计划(批准号:2013CB934200)资助的课题~~
【分类号】：O313.5
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本文编号：1931291