SU-8胶光弹性性能显微测试
发布时间：2019-01-26 09:05
【摘要】：考虑获知SU-8胶的光弹性性能有利于拓展其在微纳米领域中的应用范围,本文设计了材料应力光学系数显微测量光路,完成了SU-8胶应力光学系数的测量实验。首先,基于光弹性原理设计了测量光路,推导了求解应力光学系数的计算公式;然后,根据所设计的光路搭建了应力光学系数显微测量实验装置,在SU-8胶试样光弹性条纹的单个半级数范围内进行了单向拉伸实验;最后,利用Matlab提取实验照片组中光强值信息,得到了不同拉力下透过SU-8胶试样的单色光光强值,计算求解出了SU-8胶的应力光学系数。实验结果以及测量公式计算显示,SU-8胶的应力光学系数为(3.007±0.149)×10 11 m2/N,大于光学玻璃等材料的应力光学系数,也远大于二氧化硅等MEMS领域常用材料的应力光学系数。实验结果可为以SU-8胶为材料,通过光弹性原理进行微力测量的微探针、微夹钳等的设计与制作打下基础。
[Abstract]:Considering that the photoelastic properties of SU-8 are helpful to expand its application range in the field of micro- and nano-scale, the optical path of material stress optical coefficient measurement is designed in this paper, and the measurement experiment of SU-8 adhesive stress optical coefficient is completed. Firstly, based on the principle of photoelasticity, the measuring optical path is designed, and the formula for calculating the stress optical coefficient is derived. Then, according to the designed optical path, a micro-measuring apparatus of stress optical coefficient is built, and the uniaxial tensile test is carried out in the range of a single semi-series of photoelastic stripes of SU-8 adhesive samples. Finally, using Matlab to extract the light intensity information from the experimental photo group, the monochromatic light intensity values of the SU-8 adhesive samples under different tensile forces were obtained, and the stress optical coefficients of the SU-8 adhesive were calculated. The experimental results and the calculation of the measurement formula show that the stress optical coefficient of SU-8 adhesive is (3.007 卤0.149) 脳 10 ~ (-1) 脳 10 ~ (11) m ~ (2 / N), which is larger than that of optical glass and other materials. It is also much larger than the stress optical coefficient of MEMS materials such as silica. The experimental results can lay a foundation for the design and fabrication of microprobes and clamps based on the photoelastic principle of SU-8 adhesive.
【作者单位】： 大连理工大学机械工程学院;
【基金】：国家自然科学基金(No.51175056) 国家973重点基础研究发展计划资助项目(No.2011CB302101) 中央高校基本科研业务费专项资金资助项目(DUT14RC(3)006) 中国博士后科学基金(2014M561226)资助课题
【分类号】：O348.1
[Abstract]:Considering that the photoelastic properties of SU-8 are helpful to expand its application range in the field of micro- and nano-scale, the optical path of material stress optical coefficient measurement is designed in this paper, and the measurement experiment of SU-8 adhesive stress optical coefficient is completed. Firstly, based on the principle of photoelasticity, the measuring optical path is designed, and the formula for calculating the stress optical coefficient is derived. Then, according to the designed optical path, a micro-measuring apparatus of stress optical coefficient is built, and the uniaxial tensile test is carried out in the range of a single semi-series of photoelastic stripes of SU-8 adhesive samples. Finally, using Matlab to extract the light intensity information from the experimental photo group, the monochromatic light intensity values of the SU-8 adhesive samples under different tensile forces were obtained, and the stress optical coefficients of the SU-8 adhesive were calculated. The experimental results and the calculation of the measurement formula show that the stress optical coefficient of SU-8 adhesive is (3.007 卤0.149) 脳 10 ~ (-1) 脳 10 ~ (11) m ~ (2 / N), which is larger than that of optical glass and other materials. It is also much larger than the stress optical coefficient of MEMS materials such as silica. The experimental results can lay a foundation for the design and fabrication of microprobes and clamps based on the photoelastic principle of SU-8 adhesive.
【作者单位】： 大连理工大学机械工程学院;
【基金】：国家自然科学基金(No.51175056) 国家973重点基础研究发展计划资助项目(No.2011CB302101) 中央高校基本科研业务费专项资金资助项目(DUT14RC(3)006) 中国博士后科学基金(2014M561226)资助课题
【分类号】：O348.1
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