飞秒激光双光子聚合加工中的三维AMF模型处理技术研究

发布时间：2018-04-14 05:18

本文选题：双光子聚合 + AMF数据模型　；参考：《长春工业大学》2017年硕士论文

【摘要】：飞秒激光双光子聚合(Two-Photon Polymerization,简称TPP)加工是一种集计算机辅助设计、辅助制造于一体的三维微纳结构加工技术。该技术能突破光的衍射极限限制制备特征尺寸小于100nm的微观结构,可实现任意复杂三维微纳结构或器件的制备。至今为止,双光子聚合已被应用于微光学元件、微机电系统、微流体、超材料、生物医疗器件等的制备。三维数据模型作为TPP加工的依据,是实现TPP制造的前提和基础。当前TPP的三维结构模型无论是通过正向设计建模还是逆向工程重建获取,均需要结合TPP加工工艺的具体要求和现有加工系统的约束条件进行相应的处理才能满足TPP加工的需求。因此三维模型的处理是TPP的技术核心之一,是高精度、高效率实现TPP微纳结构加工的数据基础和前提。为了满足大面积三维微纳结构快速加工的需求,大行程气浮运动平台和二维振镜的三维扫描系统逐渐被应用,这需要与之相应的数据接口。因此,本文针对TPP加工的AMF数据模型、AMF模型的切片方法、切片的截面轮廓拟合以及激光扫描的路径进行研究。论文主要研究成果如下:(1)为了实现对特征尺寸在微纳米级的复杂三维结构的全面、精确的几何描述并减少数据存储量,本文在一种新的叠加制造数据模型AMF(Additive Manufacturing File Format)文件格式下,通过分析AMF文件的数据结构、模型精度、数据存储量,提出了AMF曲面模型的细分算法并进行了实例验证。(2)提出了基于AMF模型三角面片边信息排序的切片算法。根据AMF数据模型特点,剔除掉AMF文件中所有多余的三角面片的边,之后建立剩余的每个边与相邻两三角面片间的拓扑关系,并根据每条边的左值大小对边进行排序,用一系列iZ(28)z的切平面与这些边相交求交点,得到三维结构切片的截面轮廓。进行了实验验证,结果表明,此方法具有较好的稳定性和可行性,不会产生冗余数据并且在不确定AMF文件是否存在错误情况下仍可用。(3)为了保证加工件的尺寸精度和形状精度,对切片的截面轮廓进行处理,根据样条曲线轮廓与光栅式扫描相结合的连续扫描加工方式,对TPP加工中激光扫描的路径规划进行了研究:首先对切片的截面轮廓进行分段处理,之后以最小二乘曲线逼近原则对截面轮廓进行分段NURBS曲线拟合;再采用光栅式扫描方式对切片截面进行填充。最后,为了方便对数据处理的查看、把控和跟踪。基于Matlab搭建了双光子聚合加工中AMF模型的数据处理系统,并对切片截面轮廓处理进行了实例验证,证明了系统的可行性。
[Abstract]:Two-Photon Polymerization (TPPN) machining of femtosecond laser two-photon polymerization (TPP) is a kind of 3D micro / nano structure machining technology, which integrates computer aided design and manufacturing.This technique can break through the limit of diffraction limit of light to fabricate the microstructures whose characteristic size is smaller than that of 100nm, and can realize the fabrication of arbitrary complex three-dimensional microstructures or devices.So far, two-photon polymerization has been used in the fabrication of micro-optical elements, micro-electromechanical systems, micro-fluid, supermaterials, biomedical devices and so on.As the basis of TPP processing, 3D data model is the premise and foundation of TPP manufacturing.At present, the 3D structure model of TPP is obtained by forward design modeling or reverse engineering reconstruction. It is necessary to deal with the specific requirements of TPP machining process and the constraints of existing processing system to meet the needs of TPP machining.Therefore, the processing of 3D model is one of the core technologies of TPP, which is the data base and premise of high precision and high efficiency to realize TPP micro / nano structure machining.In order to meet the need of rapid machining of large area 3D micro / nano structure, the three dimensional scanning system of large stroke air floating motion platform and two dimensional vibrating mirror is gradually applied, which requires the corresponding data interface.Therefore, in this paper, the slicing method of AMF data model made by TPP, the section profile fitting and the path of laser scanning are studied.The main results of this paper are as follows: (1) in order to achieve a comprehensive and accurate geometric description of the complex 3D structure with feature size at the micro and nanometer level and reduce the data storage, this paper is based on a new superposition manufacturing data model AMF(Additive Manufacturing File format.By analyzing the data structure, model precision and data storage of AMF file, the subdivision algorithm of AMF surface model is proposed and verified by an example. (2) the slicing algorithm based on AMF model triangulation edge information sorting is proposed.According to the characteristics of AMF data model, the edges of all redundant triangles in the AMF file are eliminated, then the topological relationship between each remaining edge and the adjacent two or three corners is established, and the edges are sorted according to the left value of each edge.The intersection points between a series of iZ(28)z tangent planes and these edges are obtained, and the section profiles of 3D structural slices are obtained.The experimental results show that this method has good stability and feasibility, does not generate redundant data and can be used in the case of uncertain AMF file error.) in order to ensure the dimension accuracy and shape accuracy of the workpiece,The section profile of slice is processed, and the path planning of laser scanning in TPP machining is studied according to the continuous scanning method of spline curve contour and raster scanning. Firstly, the section contour of slice is processed in sections.Then the section profile is fitted with NURBS curve by using the least square curve approximation principle, and the section section is filled with raster scanning method.Finally, in order to facilitate the view of data processing, control and tracking.The data processing system of AMF model in two-photon polymerization machining is built based on Matlab, and an example is given to verify the feasibility of the system.
【学位授予单位】：长春工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP391.7

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